切削油裡SiC粉末回收利用之研究

本研究將切削廢液回收之碳化矽有效的再利用於電子產業，以應用於高溫燒結承載基板為主。大量切削廢液主要是含有矽泥的切削油，這些矽泥中含有碳化矽、矽及氧化矽。如果可以有效進行回收，不僅可以有效利用這些廢棄物並減少切削廢液處理的成本，亦能將碳化矽與矽回收再利用來降低對環境的衝擊。高溫燒結承載基板是以回收SiC為基板，在表面覆蓋一層釔安定氧化鋯。本實驗利用粉末自體研磨來減少粉末粒徑與銳角，經過造粒後成功將回收的SiC粉末製作成基板，並使用溶膠凝膠法製備SiO_2中間層，再將ZrO_2披覆於SiC基板上，製作出SiC/ZrO_2複合陶瓷基板，因引入SiO_2中間層成功改善ZrO_2披覆層與SiC基板匹配性問題。SiC/ZrO_2複合陶瓷試片經高溫燒結1,400～1,550℃，分析試片之相結構、顯微結構、成分分析、熱膨脹率等。

關鍵字

碳化矽；基板；切削廢液回收

並列摘要

In this study, we effectively reused recycling SiC powders which are came from cutting waste oil in the electronics industry. The main purpose is to make recycling SiC powders as high temperature substrates. Waste oil mainly contains silicon mud which includes the silicon carbide, silicon and silicon oxide. If silicon mud can be reused effectively, the treatment cost should be decreased, and environment impacting should be also reduced. High temperature sintering substrate is made by recycling SiC powders, then coating a layer of yttrium stabilized zirconia on the surface. In the experiment, the powders self-grinding were carried out in order to reduce the particle size and the acute angle. After self-grinding, SiC powders were successfully made into a substrate. The SiO_2 was coated by sol-gel method as middle layer, then Y-ZrO_2 layer was coated on the SiC substrates. SiO_2 middle layer was successfully to improve the mismatch between ZrO_2 coatings and SiC substrates. The SiC disc was sintered at a high temperature from 1,400℃ to 1,550℃. The specimens were analyzed such as phase evolution, microstructure, component, thermal expansion rate etc.

並列關鍵字

SiC ； Substrate ； Cutting waste recycling

國際替代計量

切削油裡SiC粉末回收利用之研究

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