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用標準矽製程整合90°和180°耦合器之吉伯特毫米波混頻器

Millimeter-Wave Gilbert Mixers with Microwave Quadrature/Differential Couplers Using Standard Silicon Process

摘要


近年來,在微波甚至毫米波頻段中,因波長隨著操作頻率升高而大幅縮小,許多被動元件因而可以整合於標準矽製程,並與主動電路結合與應用。本研究利用矽基板的高介電常數來縮小被動元件面積,並進一步將馬爾尚巴倫、正交耦合器、鼠徑分波耦合器等元件直接設計在標準矽製程上(低電阻~10歐姆•公分),而不需使用金屬層作為矽基板隔絕。其中,電路設計必須考量到傳輸線路徑的平衡和失真等問題,以容忍不可避免的損耗,並且維持元件的基本功能。

並列摘要


Several microwave passive components can be integrated with active circuits in standard silicon processes for millimeter-wave applications. In this work, passive components such as Marchand baluns, quadrature couplers, and rat-race hybrids coupler are directly implemented on a standard low-resistivity (~10W×cm) silicon substrate for size reduction due to the high dielectric constant. The design concepts such as balanced path loss and distortionless transmission lines are considered to tolerate the unavoidable loss and to keep the functionality of components.

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