光誘發式介電泳晶片於動態式、自發性連續微粒分離之應用

Light-Induced Dielectrophoresis for the Applications on Dynamic and Passive Continuous Separation of Microparticles

鄭宜肪 ； 林育德 ； 劉興倫 ； 張憲彰

《國家奈米元件實驗室奈米通訊》 19卷3期 (2012/09) Pp. 38-45

https://doi.org/10.29913/NDLC.201209.0006

摘要

本研究利用一簡易便宜的方式以Indium Tin Oxide（ITO）、感光層Amorphous Silicon（a-Si）與雷射加工所製作成之生物微流體晶片，再配合便宜簡便之光學投影機投影，製作出可變式、大範圍之三維電場分佈以達成生物微粒之操控、分離與濃縮。本研究以光誘發式介電泳技術（Light-induced Dielectrophoresis, LIDEP）進行，相較於以往傳統經複雜昂貴的金屬鍍膜、微影、蝕刻與對準接合等微機電製程之介電泳晶片，LIDEP晶片僅需簡易低成本的光敏材料之鍍膜製程即可完成，不需以微影蝕刻定義出電極圖形，改以光學投影法產生大範圍、可控、可變之虛擬電極。本研究以兩種方式進行金屬電極晶片較難達成的分離效果，（1）以動態圖形變化進行連續式強弱電場區的變化之動態式微粒分離，可即時操控與選定特定細胞，（2）以灰階圖形產生之大範圍電場梯度進行連續式分選不同尺寸之微粒子，以灰階式的光學圖形投影在具有光敏功能之生物晶片，進而誘發出非均勻交流電場，使生物粒子受電場極化產生介電泳力（Dielectrophoresis Force, DEP），以此物理現象結合微流體系統，將生物粒子自動且連續地濃縮或分離。在流率為0.8 μl/min，電壓為36Vp-p、10 kHz 之交流電下，2μm latex呈現正介電泳力而10μm呈現負介電泳力，便以此現象分離不同粒徑大小粒子，該分離效率分別可達84%與75%。

關鍵字

光誘發式介電泳 ； 動態式微粒分離 ； 灰階 ； 微流體

並列摘要

Dielectrophoresis (DEP) only can affect the particles within very local areas due to the electric field is exponentially decayed by the distance away from the electrodes. Furthermore, the dynamic and reconfigurable patterns can not be achieved by using metal/structure-based DEP chip. This article presents two strategies of light-induced dielectrophoresis (LIDEP) for passive, dynamic and continuous separation of microparticles. LIDEP enables to achieve the parallel manipulation of particles without complicated or expensive microfabrication processes, such as photolithography and metal deposition/ etching. With this approach, users are able to define the unlimited geometries such as dynamic patterns, changeable patterns, gray-scale patterns, and reconfigurable strategies for realizing the variable electric field distribution. Gray-scale light-induced dielectrophoresis (GS-LIDEP) generated a wide-ranged DEP force that is capable of working on the entire area of the microfluidic channel, and thus the mix of particles can be passively and continuously separated toward the opposite directions by the both positive and negative GS-LIDEP forces. 2 and 10 μm polystyrene particles can also be passively and well separated using the multi-step GS pattern through positive and negative DEP forces, respectively, under an applied voltage of 36 Vp-p at the frequency of 10 kHz.

並列關鍵字

Light-induced Dielectrophoresis ； Dynamic Separation of Microparticles ； Gray-scale ； Microfluidic