摘要
由於尺度效應，奈米材料之化學成分可應用表面化學分析技術分析。以X射線為探測源，偵測被激發出、具元素特徵且動能低的光電子所得到之電子能譜可用來定性與定量分析化學組成與狀態。此技術稱為化學分析電子能譜儀，是一種泛用於各種材料且具有分析化學狀態能力的表面分析技術。本文介紹應用化學分析電子能譜分析所需具備的知識，包括基本儀器架構、定性與定量分析、化學位移分析、伴峰種類與辨別以及縱深分析等。近幾年來，X射線源聚焦掃描技術與C60離子槍的開發，使得化學分析電子能譜儀分別具有更優異的微區分析與低損害濺擊縱深分析能力，成為分析奈米材料化學成分的利器。
並列摘要
Due to the size effect, the chemical composition of nanomaterials can be analyzed by means of surface chemical analysis techniques. Electron spectra of photoelectrons induced by X-ray and elemental specified can be utilized for qualification and quantification of chemical components and states. This technique called Electron Spectroscopy for Chemical Analysis (ESCA) is a surface analysis technique widely used for various materials and possesses the capability of analyzing chemical state. The fundamental knowledge when utilizing ESCA is introduced in this article including basic instrumental construction, qualitative and quantitative analysis, chemical shift analysis, satelines distinguishment and depth profile analysis. Recently, the developments on scanning technique of focused X-ray probe and on C60 ion sputter gun enable ESCA with superior abilities respectively on micro-sectional analysis and on low damage depth profiling.