光子晶體面射型雷射元件技術發展

Development of Photonic Crystal Surface Emitting Laser Devices

黃聖哲 ； 洪國彬 ； 邱瀚綸 ； 盧廷昌

《國家奈米元件實驗室奈米通訊》 25卷2期 (2018/06) Pp. 2-11

摘要

本文簡述光子晶體雷射的操作原理與發展歷程，並介紹本實驗室在發展具有透明導電層之電激發式二維光子晶體雷射之成果。二維週期性光子晶體圖案由週期性空氣孔洞所組成，並具有適當之週期比例，其後鍍上之透明導電薄膜並覆蓋整個光子晶體區域用以形成電流擴散層進一步優化透明導電層的製程參數條件，除提供透光性與電流均匀散佈之途徑，不僅得以簡化整體製程流程與降低製程難度，也能有效提升光學侷限特性，進而貢獻最大增益於元件結構内，並實現次世代光源低閾值，小發散角與高品質之雷射輸出。

關鍵字

光子晶體 ； 氧化銦錫 ； 透明導電氧化層 ； 光子晶體雷射

並列摘要

The operation principle and development of photonic crystal lasers will be briefly introduced, followed by a result of electrically-pumped two-dimensional photonic crystal laser with transparent conductive oxide layer structure. The two-dimensional photonic crystal pattern through the etching process is composed by periodic air-holes with proper duty cycle. Then, the transparent conductive oxide layer is directly deposited on the top of the entire two-dimensional photonic crystal structure to form a current spreading layer. The uniform current spreading and the transparency is provided through the optimized design in advance and practically deposited transparent conductive oxide layer. In addition to simplifying the whole fabrication process, the optical confinement is improved and the maximum gain to optical feedback is obtained. Overall, low threshold, small divergence angle and high quality laser output will meet the requirements for next-generation light sources.

並列關鍵字

Photonic Crystal ； Indium-tin-oxide ； Transparent Conductive Oxide Layer ； Photonic Crystal Laser