The platium-modified titanium oxide (Pt/TiO2) particles have been successfully made by photocatalytic deposition on Degussa P-25. Those photocatalytic particles are then deposited onto the indium tin oxide (lTO) substrate to form thin films of Pt/TiO2 by means of dip-coating and spin-coating processes. The morphology, crystaIIine structure, the extent of dispersion of Pt/TiO2, and the correlation among these factors to the coating conditions of Pt/TiO2 films have been investigated using scanning tunneling microscopy (STM) technique.