Analysis of Surface Property of TiO2 Thin Film Prepared by Sputtering

Ching-Hua Wei ； Chin-Tu Lu ； Wu-Chung Sue ； Ching-Min Chang ； Chun-Ko Chen

《淡江理工學刊》 10卷2期 (2007/06) Pp. 177-181

https://doi.org/10.6180/jase.2007.10.2.16

並列摘要

This paper reports the characteristic of titanium dioxide (TiO2) thin film prepared by sputtering on the ITO glass. The principal parameter in sputtering process is to change temperature of substrate holder in the sputtering chamber. Five different temperatures (22, 50, 100, 150 and 200℃) were set on the substrate holder. After preparing TiO2 thin film, the transparency and absorptive performance of TiO2 thin film between 200~450nm were inspected by using UV-VIS spectrophotometer. The hydrophilic property of TiO2 thin film by UV-light irradiation was observed by using contact angle measurement. The results showed that all the thin films, manufactured at different temperature, had ability to absorb UV-light and to perform good transparency. The contact angle measurement showed the films made by the higher temperature of substrate holder can get better hydrophilic property.

並列關鍵字

Substrate Temperature ； Sputtering ； TiO2 ； Hydrophilic Property ； Contact Angle ； UV-VIS Spectrophotometer