Acid Gas, Acid Aerosol and Chlorine Emissions from Trichlorosilane Burning Processes

This study was set out to investigate the emission characteristics of HCl (in both particle (HCl(subscript p)) and gaseous (HCl(subscript g)) forms), and Cl2 during the trichlorosilane (TCS) burning process under various relative humidity conditions (RH; range=55%-90%) which might exist at its storage area. All experiments were conducted in a test chamber. We found that HCl(subscript p) was consistently as the most dominant contaminant (=1.30×10^5-1.46×10^5 mg/m^3), followed by the HCl(subscript g)(=9.03×10^3-11.4×10^3 mg/m^3) and Cl2 (=1.91×10^3-2.18×10^3), emitted from the TCS burning process for the all selected RH conditions. The particle sizes of HCl(subscript p) fell to the range of the accumulation mode (MMADs=0.808-1.04 μm; GSDs=2.13-3.50). Fractions of emitted HCl(subscript p) reaching to the alveolar region (=85.8-88.8%) were much higher than that of the tracheobronchial region (=6.53-8.80%) and head region (=4.67-5.40%). It is concluded that more ill-health effects on the deep lung region can be expected than other regions as workers exposed to the contaminants emitted from TCS burning processes.

並列關鍵字

Trichlorosilane ； Burning process ； Acid gas, Acid aerosol ； Chlorine

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