分級自動化量測CMOS-MEMS微光柵之光訊息

本研究利用精確操控微步進驅動器，以切換不同的分割角度，觀察在馬達承載微光柵有微小角度變化時，不同的繞射圖案，觀測其不同角度對於經射圖案與鑑別率的關係。研究中利用具有極佳機電整合能力、撰寫修改容易以及相容性頗高的LabVIEW (Laboratory Virtual Instrument Engineering Workbench)虛擬圖控程式，進而控制馬達轉動之步級角。以虛擬圖控程式搭配以微步進馬達組作為元件抬升之量測平台，設計一自動化控制微光柵光訊息之量測系統，可穩定、精確的控制微光學元件的角度變化量。依照CM○S-MEMS製程規範設計微光柵元件，其製程元件光柵精細度為1μm左右，兩種微光柵柵寬分別為2μm及5μm，在固定尺寸200μm×200μm時，每公分光柵溝槽數最多可達50萬條。利用微步進驅動器細微分割馬達偏移激磁之步級角，將原本步級角為54'(0.9°)步進馬達變化角度縮小，最小可至3'23”(0.05625°)，控制負載在馬達出力軸之微光柵，微光柵其出射光具有繞射特性，改變其角度，可觀測出微光柵不同的繞射圖案，進而可得知微光柵抬升角度愈高其鑑別率相對會提高，以532nm綠光雷射入射，鑑別率最大可達3.5×10^5。

關鍵字

自動化控制系統；步進馬達；微光柵； LabVIEW

並列摘要

The micro-stepping driver was manipulated in a different division angle for the study. The different diffraction patterns can be observed with the various angles for the micro-grating loaded on the stepping motor. Further the relationship between the diffraction patterns and resolving power with various angles are investigated. Laboratory Virtual Instrument Engineering Workbench, LabVIEW, is graphical and programming software with an excellent integrated ability of mechatronics, the easily writing and correcting as well as high of compatibility. And NI Data Acquisition card is adopted to control the micro-stepping driver, thereby control the rotation of the step motor to achieve the precise control of minute-level corner angle. The micro-stepping motor driver can be slightly offset excitation for the split-step-level on the angle, so that the original step angle of 54'(0.9°) can be divided to the smallest angle 3'23”(0.05625°). The micro-grating loaded on the shaft of stepping motor can be utilized to produce a different diffraction for improving the image resolving power. In the future, the fully automated measurement system of micro-grating performance can be applied on the controllable diffraction of micro-grating to improve the image quality. There will be the benefit for the development of integrated optoelectronic devices. The micro-device will be fabricated by the common process of CIC CMOS-MEMS in this study. The width of micro-grating is 2μm with the numbers of grooves 500,000 per centimeter, when the size is 200μm×200μm. The higher elevation angle of micro-grating is the greater resolving power. The maximum resolving power is achieved 3.5×10^5 for 532nm green laser light.