High permeation hydrogen Pd membrane and Pd-Ag membrane reactors are to be prepared with sequential electroless plating process with a modification of the porous steel stainless substrate, in which an electroless deposition copper process and Al(OH)3 sol gel are used to adjust its pore structure. The characterizations of membrane were analyzed not only on the surface roughness but also on the pore size distribution of the substrate. The denseness of membrane affected by electroless deposition copper modification was tested at first and at last. The material distribution by cross section images of SEM / EDS, and the factors that affect the denseness of membrane were determined. The minimum thickness of Pd/Ag deposition for a dense membrane was correlated with the pore size distribution, the uniformity, and the surface roughness of the substrate.