含氮類鑽碳鍍膜微米磨潤性質之研究

Study on Diamond-like Carbon Coatings with Nitrogen Dopant in Micro Tribology

高文顯(Wen-Hsien Kao) ； 陳奕佑(I-Yu Chen) ； 卓廷彬(Cho-Ting-Bin)

《建國科大學報》 28卷3期 (2009/04) Pp. 73-86

https://doi.org/10.6995/JCTU.200904.0073

摘要

本研究使用非平衡磁控濺鍍法置備類鑽碳(DLC)系列薄膜。針對鍍膜材料之微奈米磨潤性質進行實驗，以磨耗試驗機(Ball on disc)磨耗的方式來進行微奈米磨潤性質實驗，對施加負載之實驗參數，來做不同鍍膜參數材料微奈米磨潤之實驗分析。由實驗與分析的結果，以氮氣流量1sccm的鍍膜表現最佳的抗磨耗性，包括最低的磨耗深度和最低的摩擦係數，結果顯示加入適量的氮氣有助於提升DLC鍍膜的磨潤性質。

關鍵字

類鑽碳膜 ； 磨潤性質 ； 微米磨潤

並列摘要

In this study, the DLC coatings were prepared using the closed field unbalanced magnetron sputtering method. The micro/nano test was employed to measure the coating micro/nano tribological properties. The ball on disc test is used to measure the micro/nano tribological properties. The factor is applied load. By the results from experiments and analysis, the nitrogen current capacity with 1sccm coating reveal the best tribological properties including the lowest wear depth and the lowest friction coefficients. The results show the appropriate nitrogen content can promote the tribological properties of the DLC coating.

並列關鍵字

Diamond like carbon film ； tribological properties ； Micro tribology