多功能高穿透率薄膜設計及製作

Design and Fabrication of Functional High Transmittance Films

劉厥揚 ； 朱家和 ； 連水養

《明道學術論壇》 6卷1期 (2010/03) Pp. 77-86

https://doi.org/10.6953/MJ.201003.0076

摘要

本研究的目的在於製備超親水自潔而且具備高穿透性質的薄膜。利用旋轉塗佈法在玻璃基板上沉積具不同功能性的TiO2-SiO2混成膜，並透過不同的轉速使薄膜具有不同的穿透率及厚度，而且可保持高的平均穿透度並具有好的親水性及紫外光催化自潔效果。藉由光學薄膜商用軟體的模擬設計與分析，得知當TiO2-SiO2薄膜的厚度約為150 nm時，平均穿透度較玻璃為高。此外，由橢圓儀的測定數據得知，當鍍上此薄膜時折射率約為1.83且平均穿透率較玻璃高，與模擬的結果符合。本研究也將此薄膜應用於太陽電池上。結果顯示，鍍上此薄膜後，太陽電池的效能可提高約2.6%。

關鍵字

TiO2-SiO2 ； 超親水性 ； 自潔 ； 太陽電池 ； 薄膜

並列摘要

In this study, the fabrication of super-hydrophilic self-cleaning and high transmittance thin films has been developed. These TiO2-SiO2 films deposited by spin-coated on the glass substrate, and the transmission and thickness were controlled by spin rate varied. These films proceed annealed exhibiting antireflection, super-hydrophilicity and self-cleaning properties. The optical thin films software was used to design and analyze the TiO2-SiO2 thin films based on the fixed thickness of 150 nm and the average transmittance would higher than glass substrate. In addition, average refractive indices of the thin films about 1.83 and the average transmission would high than glass substrates were determined by ellipsometry. Furthermore, these films were used for the solar cell application. The results shows that the conversion efficient of the solar cell would enhance 2.6 % by deposited the SiO2-TiO2 films.

並列關鍵字

SiO2-TiO2 ； super-hydrophilic ； self-cleaning ； solar cell ； thin films