- 期刊
Investigated the Performance of MgZnO Ultraviolet Photodetectors Using Magnetron RF Sputtering System
並列摘要
In this work, the magnetron RF sputtering system was used to deposit the Mg(subscript x)Zn(subscript 1-x)O films with various Mg content. The MSM-UPDs based on the sputtering-deposited Mg(subscript x)Zn(subscript 1-x)O were also fabricated and characterized. From the reported experimental results of the XRD measurement and UV-VIS spectroscope demonstrate that a part of Zn atoms can be replaced by the Mg atoms in the Mg(subscript x)Zn(subscript 1-x)O films. At a 10 V bias, the dark current of Mg(subscript x)Zn(subscript 1-x)O (x=0~0.36) MSM-UPDs were 5.6pA (x=0.36) to 15.4pA (x=0). The photoresponsivity of 0.31A/W was achieved for all of the MSM-UPDs with various Mg content. When the Mg content x increases from 0 to 0.36 the cut-off wavelength of the detector varies from 380nm to 310nm and the corresponding rejection ratio decreases slightly from 871 to 792.
延伸閱讀
- Chen, Y. Y. (2015). MgZnO Alloying Thin Films for Piezoelectric Self-Powered Photodetectors [master's thesis, Feng Chia University]. Airiti Library. https://doi.org/10.6341/fcu.M0203306
- 李欣縈、林詠濠、謝文明、李清庭（2012）。Investigation of ZnO-based Thin Film Transistors Deposited by Radio Frequency Magnetron Co-sputtering System。真空科技，25(1)，40-46。https://doi.org/10.29808/JVSROC.201203.0005
- 吳宗翰（2014）。MgZnO/ZnO heterostrucure based UV photodetectors fabricated using large area compatible processes〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2014.10208