Full-field Three-Dimensional Angle-deviation Optical Microscope

Ming-Hung Chiu ； Chen-Tai Tan ； Ming-Hung Tsai ； Ya-Hsin Yang

《Smart Science》 3卷1期 (2015/02) Pp. 46-55

https://doi.org/10.6493/SmartSci.2015.286

並列摘要

This study proposes a full-field three-dimensional (3D) optical microscope based on reflectivity-height transformation. The slight angle deviation of the test light is caused by the sample's surface gradient; meanwhile, the light that normally passes through the sample is sensed by a parallelogram prism and transformed into reflectivity. Therefore, the reflectivity of the prism near the critical angle is proportional to the height of the surface. Using this method for microscopy has such merits as full field imaging without scanning, high vertical resolution, a simple and inexpensive structure, and real-time measurements. The errors benchmarked using the experimental results from the Atomic Force Microscope (AFM) are less than 4%.

並列關鍵字

Critical angle ； Angle deviation ； Optical microscope ； Three-dimensional ； CCD (Charge-Coupled Device)