Diffusion barrier layer plays an important role to influence the reliability and life time of thermoelectric module. In this study, sandblast pretreated the surface of TE material to increase adhesive force between TE material and barrier layer. Tantalum (Ta) and Nickel (Ni) were sputtered to TE material in order. The nickel was be used the adhesion layer between Sn-Ag-Cu solder and TE legs. TE legs were soldered with copper (Cu) electrode and annealed at 200°C for 1 hours in vacuum. This investigation measured the TE performance, including electrical conductivity and Seebeck coefficient, during soldered and annealed processes. The EDS analyzer had shown that TE legs with Ta and Ni layer could prohibit Cu and tin (Sn) atom into Bi2Te3 alloys. Therefore, the electrical conductivity was slightly different in TE material during these processes. Nevertheless, due to heat resistance between interfaces induced the temperature difference between TE leg and Cu electrode, the effective Seebeck coefficient was reduced at the same extremity temperature.