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摻雜氮元素之二氧化鈦薄膜改善光觸媒性質研究

Improvement Photocatalytic Performance of TiO2 Films with Doping Nitrogen Element

摘要


本研究利用非平衡脈衝磁控濺鍍系統(unbalanced magnetron sputtering system, UBM)製備含氮二氧化鈦薄膜。由於二氧化鈦僅吸收紫外光線方可驅動光觸媒反應,本研究目的欲增加二氧化鈦之光吸收區域,利用摻雜(Doping)方式改變二氧化鈦能隙(Energy Band Gap, Eg)使得Eg縮小,可利用於可見光觸發反應並應用於室內環境。實驗利用光譜儀(UV Visible Spectrum)及光激發螢光譜儀(Photoluminescence, PL)量測薄膜光吸收情形與能帶間隙(Eg)的改變,最後再利用亞甲藍(Methylene Blue, MB)分解實驗實際觀察光觸媒反應。

並列摘要


The aim of this project is to investigate the doped nitrogen titanium dioxide which is fabricated by unbalanced pulse magnetron sputtering system. Using this way of doping nitrogen into TiO2 make narrow energy band gap (Eg) and enhance photocatalytic effect. We hope TiO2 can be used at indoor environment and can be induced photocatalytic effect at visible light. By UV Visible Spectrum and Photoluminescence (PL) we measure absorption properties of film and prove doping can narrow Eg. Final of all, we utilize methylene blue (MB) experiment to observe photocatalytic effect by solvent decomposition.

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