以ICP-AES配合濕式化學前處理分析硼磷矽玻璃中硼、磷含量

Determination of Boron and Phosphorus in Borophosphosilicate Glass by Wet Chemical Pretreatment and ICP-AES Measurement

林雨平(Y. P. Lin) ； 林敏英(M. Y. Lin) ； 朝京寧(C. N. Chao) ； 林秀琴(J. Lin) ； 池育維(Y. W. Chis)

《化學》 51卷4期 (1993/12) Pp. 427-434

https://doi.org/10.6623/chem.1993049

摘要

硼磷矽玻璃(Borophosphosilicate glass, BPSG)被使用在矽晶片上，當作多層介面隔絕物，具有電絕緣，介面保護的功能，並可增進電的穩定性與可靠性。硼與磷在BPSG中的含量會影響到上述的性質，因此建立硼磷矽玻璃的硼、磷分析技術，乃是積體電路廠所急欲建立的品管技術之一。本研究嘗試用ICP-AES的抗腐蝕系統配合濕式化學前處理分析BPSG中的硼與磷。ICP-AES是一快速且可同時間測定元素的儀器分析技術，應用ICP-AES配合HF前處理的分析，可以同時分析硼和磷，而免除目前必須用不同的分析技術個別測定的缺點或氫氟酸干擾的困擾，而且ICP-AES雖然需有濕式處理配合，但因前處理簡單快速，不失為一好的品管方法。本研究選擇氫氟酸與硝酸濃度在2.5%的前處理綠件，採取基質對應(Matrix matching)的檢量線配製方法，有效地去除分析數據偏離的疑慮。測試的樣品中，絕大部份的樣品硼與磷的回收率都落在85~115%之間。並且在與具此分析能力的實驗室比對中，得到近似的結果。

關鍵字

硼磷矽玻璃 ； 感應耦合電漿原子放射光譜分析法 ； 濕式化學

並列摘要

Borophosphosilicate glass (BPSG) is applied in the silicon integrated circuits industry for multilevel interconnection coatings and for surface passivation to provide mechanical protection and inprove electrical stability and reliability. The content of boron and phosphorus in BPSG will have effects on the properties as described above. This study intended to use wet chemical pretreatment with following corrosion resistant introduction system ICP-AES for the determination of the content of boron and phosphorus in BPSG. ICP-AES is a quickly determined and simultaneously analysis allowed instrumental technique. The application of ICP-AES with hydrofluoric acid pretreatment on the BPSG analysis has the capability of simultaneous determination of boron and phosphorus which get rids of the individual measurement problem or the interference of hydrofluoric acid. This study chose both the concentration of hydrofluoric acid and nitric acid in solution with 2.5%. And the calibration standard preparation of matrix matching is used for decreasing the errors of analytical results of samples. The recoveries of boron and phosphorus of most test samples lie in 85-115 %. This method has been performed in the colaboratory testing which obtained the similar results.

並列關鍵字

Borophosphosilicate glass (BPSG) ； Inductively coupled plasma-atomic emission spectrome-try (lCP-AE) ； Wet chemistry