半導體廠黃光區空氣中有機混存物分析方法

Analytical method of workplace airbone organics in semiconductor photolightographic processes

施慧中(Hui-Chung Shih) ； 鐘瑩(Yaniwati Kosim) ； 余榮彬(Jung-Pin Yu)

《弘光醫專學報》 28期 (1996/10) Pp. 219-234

https://doi.org/10.6615/BHIMNT.199610.28.10

摘要

本研究選擇於半導體黃光區中用量較大之五種勞委會列管化合物：丙酮、異丙醇、乙酸正丁醋、二甲苯和乙二醇單乙醚醋酸酯為建立分析參考方法之研究對氣，期能提供代檢服務業或工廠作為例行環境檢測方法之參考。活性碳管(100 mg/50 mg)和被動式採樣器分別為採集介質，並以氣相層析儀測試分析。結果以活性碳管配合內含5 %(v/v) 2-丁醇之二硫化碳的組合所得脫附效率較佳。在混合狀態下五種化合物之脫附效率約為93%至101%，且變異係數小於3.5 %。於22 ℃，50%相對濕度及200mL/min之採樣流量率下，建議之最大採樣體積為9.6L。於5℃冷藏貯放條件下，混合樣品15天後之回收率除丙酮外均可達90 %以上。本方法除已由其他兩家認可實驗室驗證確認外，亦已實際應用於現場之環境測。

關鍵字

半導體廠 ； 作業環境測定 ； 脫附效率 ； 破出測試

並列摘要

An analytical method of workplace airborne organics in the semiconductor photolithographic process was developed. Acetone, isoproply alcohol (I PA) , n-butyl acetate (n-BA), xylene , and 2-ethoxyethyl acetate (2-EEA) were the target chemicals. Activated charcoal tube was used as sampling medium and CS2 with 5 % (v/v) 2-butanol as desorption reagent , samples were analyzed by gas chromatography equipped with a flame ionization dector. The average desorption efficiencies of these five organic mixtures were 100% , 93% , 101% , 94% and 96% respectively , and the coefficient of variation were less than 3.5%. The recommended maximum sampling volume was 9.6L at 22 'c and 50% relative humidity. The stability of collected vapor mixtures on charcoal tubes except acetone was prolonged for 15 days under 5'C storage condition. This method had been validated by two other laboratories and been successfully applied to semiconductor workplace monitoring.

並列關鍵字

semiconductor ； workplace monitoring ； desorption efficiency ； breakthrough