大氣電漿精密鏡面拋光檢測技術

Optical Interference Measurement Technology for Characterizing Lens Surface after Plasma Polishing

張奕威 ； Abraham Mario Tapilouw ； 陳俊賢

《機械工業雜誌》 463期 (2021/10) Pp. 63-70

摘要

在先進製程與電子產品多元化的發展下，精密光學應用產業持續擴大，國內廠商持續投入鏡片與模仁精密加工與檢測技術的研究與發展。隨著製程技術不斷提升，精密光學鏡片多道加工成型精度規格日漸嚴苛，傳統的生產加工與離線檢測流程已無法滿足生產需求。為使生產效能與良率提升，本研究透過光干涉量測技術的整合讓五軸加工平台具備智能檢測功能，使加工與檢測流程最佳化，可於精密加工後對鏡片的表面特性進行量測與分析，並回饋數值給予加工系統進行再加工路徑規劃，藉由智慧製造的方式提升加工與檢測效率。

關鍵字

光干涉量測技術 ； 電漿拋光技術 ； 三維形貌量測技術

並列摘要

As the electronic products develop toward diversification, the manufacturers in the precision optical lens industry continue to explore surface processing technology that is precisive, contact-free, and with in-situ 3D topography characterization. The specification of lens topography becomes stricter than before, and traditional processing method and offline topography inspection process cannot meet the requirements. In order to meet the requirements of lens specification while improving processing efficiency, the optical interference profile measurement technology is integrated to the five-axis machining platform to equip with intelligent inspection. After the precision lens machining process is completed, the measurement system measures and analyzes the surface characteristics of the lens, and then feedbacks the 3D topography error value to plan the reprocessing path. The intelligent manufacturing improves the manufacturing and inspection efficiency.

並列關鍵字

Optical interference measurement technology ； Plasma polishing technology ； Three-dimensional shape measurement technology

參考文獻

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