全球化合物半導體設備市場及產業發展趨勢

半導體設備領域的製程技術相當複雜，長期以來由美國、日本和歐洲的廠商所壟斷。尤其在COVID-19、俄烏戰爭與全球通膨的影響之下，近年在各關鍵領域皆有國內外企業及廠商尋求突破，也因此逐漸地填補設備自主開發的缺口。以晶體生長和加工設備為例，其產品使用技術涵蓋材料科學、熱力學、自動控制、機械加工與設計和半導體物理等多種專業領域，需要應用熱流分析、智慧製造、精密傳動等多項技術。

關鍵字

化合物半導體基板製程；砷化鎵；磷化銦；碳化矽；氮化鎵；長晶；切片；研磨；拋光

並列摘要

The process technology of semiconductor equipment is quite complicated, and has been monopolized by manufacturers in the United States, Japan and Europe for a long time. Especially under the influence of COVID-19, the Russia-Ukraine War, and global inflation, in recent years, domestic and foreign companies and manufacturers have sought breakthroughs in various key fields of that process technology, and thus gradually filled the gap in independent development of the related equipment. Taking crystal growth and processing equipment as an example, its product technology covers various professional fields such as material science, thermodynamics, automatic control, machining and design, and semiconductor physics, and requires the application of multiple technologies such as heat flow analysis, intelligent manufacturing, precision transmission, and so on.

並列關鍵字

Compound semiconductor substrate process ； Gallium arsenide ； Indium phosphide ； Silicon carbide ； Gallium nitride ； Crystal growth ； Slicing ； Grinding ； Polishing