Synopsys sentaurus TCAD模擬軟體之安裝與其透過遠端連線執行方式之研究

Study on the installation of synopsys sentaurus TCAD simulation software and its implementation through remote connection

許重傑(Chorng-Jye Sheu)

《建國科大學報》 37卷1期 (2018/01) Pp. 17-38

摘要

本論文以向財團法人國家實驗研究院．國家高速網路與計算中心申請浮動授權版的工藝電腦輔助設計-Sentaurus TCAD軟體為主體，從Linux作業系統安裝到Sentaurus TCAD軟體安裝與設定之過程，以及針對多種遠端連線的方式進行設定、實際測試並成功獲得實現之下進行深入的探討與研究從而架構出不同層次探討的面向。透過本研究，對於從事半導體製程與元件特性模擬研究的新進人員可減輕其在系統軟體安裝上所遭遇的困難同時有助於縮短軟體安裝過程的時間。而利用Linux作業系統之多工多使用者的特性並藉由遠端連線的方式可以由不同作業系統的用戶端連線到系統軟體所在的伺服器端執行該程式，利用這樣的通訊協定方式提供了在有限資源下能有效地建置多人可以同時使用該系統軟體的實驗室架構。

關鍵字

浮動授權 ； 工藝電腦輔助設計 ； 遠端連線 ； 半導體 ； 模擬

並列摘要

In this study, the floating licensing version of Technology Computer Aided Design (TCAD) simulation software, via the application process provided by National Applied Research Laboratories．National Center for High-performance Computing, is the backbone of the whole conceptual framework. The detailed installation and setup processes of Linux operating system and Sentaurus TCAD simulation software go first. Then many kinds of remote connection methods have been set up and completed the practical testing. Due to the successful implementation, different aspect-oriented discussion and research will be constructed. With this study, we can reduce the software installation time-consuming and the difficulties encountered during the software installation process especially for the new staff in the area of semiconductor process and device characteristic.

並列關鍵字

Floating License ； Technology Computer Aided Design (TCAD) ； Remote Connection ； Semiconductor ； Simulator