以濺鍍法製備p型氧化銅半導體與電子元件之應用

Sputtering Growth of p-Type CuXO Semiconductors and Their Applications on Electronic Devices

陳巍中(Wei-Chung Chen)

指導教授 ： 吳忠幟

國立臺灣大學/電機資訊學院/光電工程學研究所/博士(2014年)

https://doi.org/10.6342/NTU.2014.10063

摘要

氧化物半導體由於可在低溫製作並成長高品質薄膜，近年來已受到相當的矚目並且迅速的發展。憑藉這些優點且可適用在各式基板上的特性，已被視為下一世代的顯示及軟性電子產品之關鍵材料。雖然n型氧化物半導體上的研究已經相當廣泛，在p型氧化物半導體的探討仍十分需要。因為欲實現高性能的互補式金屬氧化物半導體電路及有機發光二極體驅動電路，p型氧化物半導體則扮演著關鍵性的角色。由目前已發表的文獻可知，氧化銅是p型氧化物半導體中具潛力可以實現高效能p型元件的材料之一，然而其薄膜與元件特性尚無法達實際應用需求，因此氧化銅半導體的薄膜特性與元件製作需要更深入的探討。本論文中首先使用磁控濺鍍技術並搭配氧化銅靶材，在不同的濺鍍功率、濺鍍氣壓及後退火條件下，研究氧化物薄膜的結晶結構、成份、表面粗糙度、化學鍵結與導電特性及p型氧化銅薄膜電晶體特性。接下來並利用p型氧化銅薄膜的濺鍍製程技術，在室溫下成長p型氧化銅薄膜及n型氧化銦鎵鋅薄膜，於軟性塑膠基板上製備p-n 異質接面二極體，最後將此p-n 異質接面二極體成功整合於彎曲情況下仍可正常操作的軟性高頻整流器。

關鍵字

射頻濺鍍技術 ； p型氧化物半導體 ； 薄膜電晶體 ； 軟性二極體整流器 ； 無線射頻辨識系統

並列摘要

Oxide–semiconductor–based thin films transistors (TFTs), due to their various merits, have attracted much attention and been regarded as a promising next-generation TFT technology for flexible electronics and displays in recent years. In spite of rapid progresses of n-type oxide TFTs, only few p-type oxide-based transistors had been reported so far and their properties and fabrication techniques are still not good enough for practical applications. However, to realize low-power and high-performance complementary TFT circuits or to make the active matrix organic light-emitting diode displays compatible with conventional OLED structures, p-type oxide semiconductors are highly desired. Among all p-type oxides reported, copper oxide (CuXO) is considered one of the most promising candidates for realizing practical p-channel devices. However, the properties of CuXO-based TFTs are not yet good enough for practical applications, necessitating further studies.
In this dissertation, we firstly investigated sputtering deposition of p-type CuXO using the Cu2O target in Ar atmosphere. The effects of the sputtering power, working pressure and annealing processes on compositions, structures, chemical bonding and electrical properties of deposited CuXO films were studied. Results show that polycrystalline and p-type CuO-dominant or Cu2O-dominant films could be readily obtained by carefully controlling the sputtering power, working pressure under post-annealing treatment. p-type CuO TFTs using CuO-dominant films were also demonstrated.
Next, we report successful implementation of room-temperature-processed flexible n-InGaZnO/p-Cu2O heterojunction diodes on polyethylene naphthalate (PEN) plastic substrates using the sputtering technique. Using n-type InGaZnO and p-type Cu2O films deposited by sputtering at room temperature, flexible n-InGaZnO/p-Cu2O heterojunction diodes were successfully fabricated on PEN plastic substrates. The characterization of the frequency response of the room-temperature-processed flexible n-InGaZnO/p-Cu2O heterojunction diode rectifiers indicated that they are sufficient for high-frequency (13.56 MHz) applications. Preliminary bending tests on diode characteristics and rectifier frequency responses indicate their promise for applications in flexible electronics.

並列關鍵字

RF sputtering ； p-type oxide semiconductors ； thin film transistors ； flexible diode rectifiers ； RFID

參考文獻

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