- 學位論文
高頻矽基超音波噴嘴之封裝
Packaging of High Frequency Silicon-Based Ultrasonic
摘要
本篇論文包含兩部分的研究：（１）矽底高頻霧化器（２）霧化器支架（Atomizer’s holder）。研究目的為改善前代霧化器把手（Handle）易損壞的缺點，設計新一代300kHz的霧化器，並搭配3D列印製造的新設計支架套裝組合起來一並使用。 論文的第一部分探討300kHz矽底高頻霧化器的分析、設計、模擬及實際微系統（MEMS）製造的過程。噴嘴主要由壓電驅動部分和兩節噴嘴串聯的共振部分組成。首先藉由簡化分析噴嘴的一維運動方程，設計出噴嘴形狀的概廓。再來使用有限元素法的理論基礎，配合有限元素軟體的使用，逐部份模擬後再合起來模擬三維實際的振動情形，討論並逐步修改除噴嘴輪廓外各部分的形狀以避開不理想的振動模態。設計出噴嘴後，再來實際進行微系統製成經有一系列曝光、顯影、對準等過程後製作出新一代的噴嘴。 論文的第二部分探討3D列印夾具的設計和製作，並組裝上的考量。3D列印的部分，探討如何改善列印出的夾具因熱收縮所造成厚度不均勻性的問題，並提出三型態層的基筏結構 （Three-layer-type structure of raft）及熱收縮更正表；組裝的部分，則考慮到探針及螺絲的選用。最後則把全部組裝起來。
並列摘要
This thesis includes two parts: (1) high frequency silicon-based ultrasonic nozzles and (2) atomizer’s holder. Our purpose is to improve the weak “handle” parts of the previous version of nozzles, to design the new 300 kHz atomizers, and to assemble them with the new holders’ package. The first part presents the design of analysis, simulation, and actually MEMS fabrication of 300kHz high frequency silicon-based ultrasonic nozzles. The new version of nozzles contains two parts: the piezoelectric driving part and the resonant part which is made of two cascaded nozzles. An one dimensional simplified model is analyzed first, and its equation of motion is worked out to obtain the contour of horn shape. Next, finite element analysis (FEM) 3-D simulation is used to calculate resonant frequencies of each part of 3D model of nozzle. All parts are first simulated individually, and then put together to simulate again. After several fine-tune adjustments, we get the final geometry of nozzles without unideal modes of vibration too near the working frequency, 300 kHz. Getting the physical modal of nozzle, the nozzle is then produced through a series of MEMS-based microfabrication process. The second part deals with the design, production, and assembling of 3D printing nozzle’s chunking appliance, the Holder. A three-layer-type structure of raft for 3D printing of acrylonitrile butadiene styrene is proposed to discuss how to reduce the thickness inhomogeneity resulted from thermal contraction, and a correction table of thermal contraction is mentioned. As for assembling part, we discuss the selection and usage of pins and screws, and finally all parts are assembled together.