開發一複合式精密掃描平台應用於大範圍量測之原子力顯微鏡

原子力顯微鏡因為能提供樣本三維的表面輪廓在奈米等級的解析度，自發明以來就被廣泛應用在各個應用領域上。然而，傳統的原子力顯微鏡系統，受限於行程較小的壓電致動器，通常只能掃描較小的範圍。本論文中，開發出一結合壓電與電磁，兩種致動器的大範圍掃描之原子力顯微鏡複合平台。此平台具備至少15 nm定位誤差與2×2 mm²大範圍之定位能力，更可掃描出具有500 μm以上的大範圍影像。本論文所提出的複合平台包含一商業型xy雙軸壓電掃描平台、一單體的並聯式折撓導引機構、一渦電流阻尼器與四組電磁致動器。此外，我們設計層疊類型的控制策略來決定兩掃描平台間的合作方式，達到長行程與高定位解析度的目標。並且，利用雷射干涉儀與應變規的量測訊號，設計一適應性互補順滑模式控制器與一類神經網路互補順滑模式控制器來有效地處理未知的系統參數、耦合效應、外在環境干擾和未知的磁滯現象。實際的實驗結果與原子力顯微鏡的掃圖應用成果展示了所設計之複合平台的定位能力。

關鍵字

精密複合掃描平台；並聯式折撓導引機構；層疊類型控制策略；互補順滑模式控制器；類神經網路互補順滑模式控制器

並列摘要

Atomic force microscopy (AFM) is a powerful technique to provide high resolution, three-dimensional data for measuring topography of samples. However, the scanning range of conventional AFM systems hardly exceeds hundreds of micrometers because of the short traveling range of piezoelectric actuation. In this research, we develop a large measurement-range AFM system with a z-scanner separated from the precision hybrid xy-scanner. The z-scanner provides high speed scanning and the hybrid xy-scanner is capable of 2 mm × 2 mm large field positioning with 15 nm resolution. The overall hybrid scanner consists of a commercial piezoelectric scanner, four sets of electromagnetic actuator, a monolithic parallel compliant mechanism, and an eddy current damper. Furthermore, we design cascaded-type control strategy and two MIMO controllers - adaptive complementary sliding mode and neural network complementary sliding mode controller to deal with the unknown parameters, the cross-talk effects, the external disturbances and unknown hysteresis phenomena. Finally, several experimental results and application demonstrate the scanning capability of the proposed system.

並列關鍵字

Precision hybrid scanner ； Parallel compliant mechanism ； Cascaded-type control strategy ； Adaptive complementary sliding mode controller ； Neural network complementary sliding mode controller

參考文獻

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[4] L. Hwee Choo, B. Shirinzadeh, and J. Smith, "Adaptive Sliding Motion Tracking Control of Piezo-Driven Flexure-Based Mechanism," in Control Applications, 2007. CCA 2007. IEEE International Conference on, 2007, pp. 1450-1455.

[5] K.-B. Choi and D.-H. Kim, "Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion," Review of Scientific Instruments, vol. 77, pp. 065106-7, 2006.

[6] B. J. Kenton and K. K. Leang, "Design, characterization, and control of a monolithic three-axis high-bandwidth nanopositioning stage," in American Control Conference (ACC), 2010, 2010, pp. 4949-4956.

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開發一複合式精密掃描平台應用於大範圍量測之原子力顯微鏡

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