矽基板濕式氧化法之矽波導製作

Silicon Waveguide Fabrication on Silicon Substrate by Using Wet-Oxidation Process

杜俊杰(Chun-Chieh Tu)

指導教授 ： 毛明華

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2019年)

https://doi.org/10.6342/NTU201902723

摘要

矽波導是絕緣覆矽(Silicon-on-Insulator, 簡稱SOI)平台上實現多種光子元件的基本構件。由於矽的折射率高，使的光能夠在矽波導內傳播時有良好的侷限，也讓單模矽波導的橫截面尺寸可以達到次微米等級。矽波導透過現今成熟的半導體製程技術可以製作出高集積密度的光電元件，因此在積體光學與積體電路的整合中扮演重要的角色。不過使用SOI基板來進行製作矽波導的成本較高，因此我們想用矽基板取代SOI基板來製作矽波導。
本篇論文中我們採取黃光微影製程以及濕式氧化法在矽基板上製作出矽波導。濕式氧化法的氧化速率較快。利用濕式氧化將波導與基板間產生一層埋入氧化層(Buried Oxide Layer)，使的光在波導內傳播時有良好的侷限、減少能量在傳遞時透過基板散失掉。直接在矽基板上製作波導，相較於傳統使用絕緣覆矽基板來製作其製程成本相對較低。藉由電子顯微鏡的輔助來觀察製程中每一個步驟的情形，我們成功的以矽基板製作出矽波導。最後量測波導的傳輸損耗藉此來分析其特性。

關鍵字

矽波導 ； 濕式氧化 ； 傳輸損耗

並列摘要

The silicon waveguide is a basic component for implementing various photonic devices on a silicon-on-insulator (SOI) platform. Due to the high refractive index of silicon, the light can be well confined in the waveguide during propagation, and this allows the cross-sectional dimension of single mode silicon waveguide to be able to reach sub-micron levels. Silicon waveguide can produce high integration density of optoelectronic devices through mature semiconductor fabrication technology nowadays, thus it plays an important role in integrated photonic and electronic circuits. However, using the SOI substrate to fabricate the silicon waveguide results in higher cost, and therefore we intend to use the silicon substrate instead of the SOI substrate to fabricate the silicon waveguide.
In this thesis we fabricate the silicon waveguide on the silicon substrate by photolithography and wet oxidation methods. Wet oxidation method has a faster oxidation rate. By creating a buried oxide layer between the waveguide and the substrate through wet oxidation, the light can be transmitted through the waveguide with good confinement, reducing the energy lost through the substrate during transmission. Fabricating the waveguides directly on the silicon substrate costs lower than the conventional use of the SOI substrate. With the aid of the scanning electron microscope to observe each step in the process, we have successfully fabricated silicon waveguides on silicon substrate.

並列關鍵字

Silicon Waveguides ； Wet Oxidation ； Propagation Loss

參考文獻

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[5] 姚皓凱, "濕式氧化法應用於絕緣層覆矽與矽基板上微環共振腔之製作與量測," 國立台灣大學碩士論文 (2018).