在多晶矽基板上以剝離成形法製成具分佈式布拉格反射鏡之矽基氧化鎵發光元件

GaOx light emitter with distributed Bragg reflectors on Poly-Si substrates by a lift-off method

謝䔶如(Ti-JU Hsieh)

指導教授 ： 彭隆瀚

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2022年)

https://doi.org/10.6342/NTU202200368

摘要

本論文內容主要探討利用剝離成形法，在多晶矽基板上製作以氧化鎵為主動層的發光二極體元件，進行氧化銦錫(ITO)波導層折射率與厚度調整、元件側面發光研磨、布拉格光柵多層反射鏡、電性量測與光譜量測等實驗，我們先以軟體模擬分析製成參數後，再以實驗加以驗證，量測元件各種物理特性及發光參數來進行比較，製作出能調整發光頻寬與波長的色心自發光二極體。
內容首先介紹氧化銦錫(ITO)、氧化鎵(GaOx)等材料的特性與用途，並探討在不同厚度與氣體通量下作為發光二極體材料的優缺。再以剝離成形法在元件側面製作出垂直型分散式布拉格光柵多層反射鏡(Distributed Bragg Reflector DBR)，以調整色心自發光二極體的發光光譜的波長範圍，並進行電性量測與發光角度量測分析，與Matlab模擬的元件光電場分析進行比較。
相較於一般市面上 LED使用彩色濾玻片或螢光粉來改變發光的光譜波段，吾人製作的自發光二極體以微型的光柵設計使顏色波段能更簡單並有效率的調整，讓色心自發光二極體未來能有更多邁向雷射、AR、VR等領域的應用層面。
關鍵字: 發光二極體、剝離成形法、分佈式布拉格反射鏡、氧化銦錫、矽基氧化鎵

關鍵字

發光二極體 ； 剝離成形法 ； 分佈式布拉格反射鏡 ； 氧化銦錫 ； 矽基氧化鎵

並列摘要

This these mainly discusses the use of lift-off method to fabricate light-emitting diode elements with gallium oxide as active layer on polysilicon substrates. To investigate the structure parameter effects, we adjust the refractive index and thickness of indium tin oxide (ITO) waveguide layers, polish the side of the light-emitting element, and build the distributed Bragg reflectors at one side of the active layer. Prior to characterize the certify effect, the experiments such as multilayer mirrors, electrical measurement, and solar material absorption and reflection, the parameters are first analyzed by software simulation, and then verified by actual experiments. we analyze the reasons of improvements through the results between them.
First, we introduce the properties and materials such as indium tin oxide (ITO) and gallium oxide (GaOx), and discuss the advantages and disadvantages of light-emitting diode materials under different thicknesses and gas fluxes. Then, a vertical distributed Bragg grating multilayer mirror (Distributed Bragg Reflector DBR) is fabricated on one side of the element by the lift-off method to adjust the wavelength range of the luminescence spectrum of the color center emitted diode, and conduct electrical measurement and luminescence. Angle measurement analysis, compared with Matlab simulation of component photovoltaic power plant analysis.
Compared with LEDs on the market that use color filters or phosphors to change the spectral bands of light emission, our color center emitted diode use a miniature grating design to make the color bands easier and more efficient to adjust. In the future, self-luminous diodes can have more applications in the fields of lasers, AR, and VR.
Keywords: LED/lift-off method/Distributed Bragg Reflectors/ITO/GaOx light emitter on Poly-Si

並列關鍵字

LED ； lift-off method ； Distributed Bragg Reflectors ； ITO ； GaOx light emitter on Poly-Si

參考文獻

1. https://tw.stock.yahoo.com/news/%E7%A7%91%E6%8A%80-%E7%A0%94%E8%AA%BF-2021%E8%BB%8A%E7%94%A8led%E7%94%A2%E5%80%BC%E4%BC%B035-1%E5%84%84%E7%BE%8E%E5%85%83-%E5%B9%B4%E5%A2%9E31-055847643.html

2. Huang-Yu Lin, Chin-Wei Sher, Dan-Hua Hsieh, Xin-Yin Chen, Huang-Ming Philip Chen, Teng-Ming Chen, Kei-May Lau, Chyong-Hua Chen, Chien-Chung Lin, and Hao-Chung Kuo, "Optical cross-talk reduction in a quantum-dot-based full-color micro-light-emitting-diode display by a lithographic-fabricated photoresist mold," Photon. Res. 5, 411-416 (2017).

3. Liang, K-L., Kuo, W-H., Shen, H-T., Yu, P-W., Fang, Y-H., Lin, C-C. (2021). Advances in color-converted micro-LED arrays. Japanese journal of applied physics, 60(SA0802). (2021).

4. Wu, T.; Sher, C.-W.; Lin, Y.; Lee, C.-F.; Liang, S.; Lu, Y.; Huang Chen, S.-W.; Guo, W.; Kuo, H.-C.; Chen, Z. Mini-LED and Micro-LED: Promising Candidates for the Next Generation Display Technology. Appl. Sci. (2018).

5. Ryan T. Ley, Jordan M. Smith, Matthew S. Wong, Tal Margalith, Shuji Nakamura, Steven P. DenBaars, and Michael J. Gordon , "Revealing the importance of light extraction efficiency in InGaN/GaN microLEDs via chemical treatment and dielectric passivation", Appl. Phys. Lett. 116, 251104 (2020).