磁性輔助軟模微奈米結構複製壓印製程開發研究

Development of Magnetism-assisted Micro-Imprinting Process for Replication of Nano/Micro-Structures

翁永進(Yung-Jin Weng)

指導教授 ： 楊申語

國立臺灣大學/工學院/機械工程學研究所/博士(2009年)

https://doi.org/10.6342/NTU.2009.10125

摘要

微奈米結構元件是未來應用於數位光電、通訊、平面顯示器與生物醫療等檢測儀器的關鍵零組件，而傳統微元件的複製量產技術，需要製造程序複雜的剛性模具與昂貴的精密設備，以及高溫、高壓、冷卻的過程，因而有製程耗時、成本高昂，可視化與可控性亦受限制的缺點。
本論文致力於研發低溫、低壓及快速成型的磁性軟模微奈米結構壓印製程技式。首先整合微機電製程、雷射加工/氣體微熱壓印微結構製程及陽極氧化法等技術製作微奈米結構圖案，再利用矽膠(PDMS) 複合磁性材料進行鑄造翻模，製作具適當結構強度及彈性之微奈米結構磁性軟模具，接著製備高分子材料，先期以氣體輔助粉末壓印微成形技術，進行微結構複製壓印成形，進行初步探討。隨後，並分別使用自行研發的磁性輔助壓印製程技術(包含電磁式可溫控壓印製程及電磁式UV壓印製程)，進行微奈米結構元件的磁性輔助壓印製程之製造與檢測探討，最後開發出磁性滾輪壓印製程設備，同時成功製備磁性滾輪，並針對其關鍵製備技術進行分析與探討。
本論文之主要研究內容包括：微奈米結構模具製程技術與應用探討、氣體輔助粉末壓印微成形技術分析與探討、磁性輔助微奈米結構壓印製程探討、微奈米元件檢測分析及相關製程開發探討、磁性輔助滾輪微壓印製程設備開發與探討。
本研究成功建立以微機電製程、雷射加工/氣體微熱壓印微結構製程及陽極氧化法製程，進行微奈米結構模具製備，輔以矽膠(PDMS)複合磁性材料鑄造翻膜、微奈米磁性軟模壓印複製配合磁性輔助壓印製程/磁性滾輪壓印製程之整合技術平台。在製程上，此法兼具開創性與新穎性；在製造特性上具有簡易、快速、低成本與可量產等優勢，提供微結構元件在複製製程之一較佳選擇，有助於微奈米系統科技產業提升。

關鍵字

磁性輔助奈米壓印 ； 磁性軟模 ； 複合式澆鑄技術 ； 磁性滾輪

並列摘要

Micro-nano structural components are the key components to be applied in future instrumentation for digital optoelectronics, telecommunications, flat panel displays, and bio-medicine. The conventional micro-component production technology requires a rigid mold of complicated manufacturing processes, expensive precision equipment, high temperature, and high pressure cooling processes. Therefore, the process has disadvantages, such as time-consuming, costly, and limited in visualization and controllability.
This study aimed to develop a micro-nano structural imprinting processing technology of low temperature, low pressure, and rapid prototyping magnetic soft mold. It first integrated the micro-electro-mechanical process, laser processing/gas micro-thermo imprinting micro-structural manufacturing process, Anodic Aluminum Oxide (AAO) method, and nano oxidation technology to produce micro-nano structural patterns. Then, it employed PDMS composite magnetic materials to create a micro-nano structural magnetic soft mold of appropriate structural strength and flexibility by casting mold, and then prepared polymer materials. In the initial stage, it discussed the imprint forming of micro structural reproduction, using gas-assisted powder imprinting micro-forming technology. Then, it employed self-developed magnetic-assisted imprinting processing technology (including electromagnetic controllable imprinting process and electromagnetic UV imprinting process) to discuss the production and detection of magnetic-assisted imprinting processes for micro-nano structural components. Finally, it developed a magnetic roller imprinting process equipment, and successfully produced magnetic rollers, while analyzing and exploring key manufacturing technologies.
The main research contents included discussion on micro-nano structural mold processing technology and its applications, analysis and exploration on gas-assisted powder imprinting micro-forming technology, discussion on magnetic-assisted micro-nano structural imprinting process, discussion on micro-nano component detection analysis and development of related processing procedures, and discussion and development of magnetic-assisted roller micro imprinting processing equipment.
This study successfully established the integrated technological platform of micro-electro-mechanical processing procedures, laser processing/gas micro-thermo imprinting of micro structure processing procedures, AAO method, nanooxidation processing procedures to prepare micro-nano structural molds supplemented with PDMS composite magnetic material casting imprinting film, and micro nano magnetic soft mold imprinting reproduction, according to magnetic-assisted imprinting processing procedure/magnetic roller imprinting processing procedure. This method is innovative and creative in terms of processing procedures, and has advantages of simple, fast, inexpensive, and available for mass production, as well as providing a better alternative in the reproduction of micro structural components, contributing to the upgrading of the science, and technological industry of micro nano systems.

並列關鍵字

magnetic nanoimprint ； magnetic soft mold ； composite casting ； magnetic roller

參考文獻

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