摘要
本研究主要目的係基於聚焦尋形(SFF)理論建構一微米等級量測系統。基本方式是以精密的移動平台在不同的高度擷取數張影像，再藉由影像處理技術(灰階等化、離散式高斯濾波以及高增幅濾波)強化所擷取的影像，同時利用Modified Laplacian 聚焦演算法將影像聚焦清晰程度予以量化，找出在不同高度之下聚焦值的分佈，理模型經由上述程序最後利用高斯插入法決定每一像素的高度資訊。如此，即可轉化影像資料並取得待測物的三維輪廓點資料。本量測系統經由圓球(R=225 µm)標準件的量測後獲得之平均值與標準差分別為221.56 µm與8.95，初步驗證了本系統的可行性與總體精度。
並列摘要
The objective of this research is to construct a micro-scale non-contact measurement system based on Shape-from-Focus theory. The procedure for the measurement system is by the following steps: first, taking images on different height, second, enhancing the taken images with Image Processing including High-boost filtering, Discrete Gaussian Filter and Histogram Equalization, third, quantifying the focus degree of the taken images to define the distribution of the focus on different height, and final, deciding the height of each pixel with Gaussian Interpolation. So the 3D information of the specimen can be obtained by the taken images. Via measuring a sphere 225 µm in radius, the usability and precision of the measurement system is confirmed. The standard deviation and the average of the measurement system are 8.95 and 221.56 µm.