利用電光相位調制奈米級菲佐干涉位移量測儀

Nano-scale displacement measuring Fizeau interferometer using electro-optical phase modulators

謝晉祐(Chin-Yu Hsieh)

指導教授 ： 陳亮嘉

國立臺灣大學/工學院/機械工程學研究所/碩士(2019年)

https://doi.org/10.6342/NTU201901383

摘要

隨著科技的進步，高精密產業對高精密檢測設備與量測技術的需求也不斷增加。在業界需求方面以半導體產業為大宗。精密檢測需求通常會需要一易安裝、不佔機台設計空間的量測設備，因此本研究開發一奈米級精度的光纖式干涉儀，研究中針對單頻干涉儀的特性做探討研究與改善。
為減少單頻干涉術直流項與訊號正交性對量測精度的影響，同時兼顧系統體積及安裝彈性。本研究建立一套光纖式架構的菲佐干涉位移量測系統。利用準直器、光循環器等光纖元件增加系統安裝彈性，利用電光調制器提高相位調制的時間效率。最後干涉訊號送入光偵測器，並傳輸至電腦作相位偵測，進行位移訊號處理。
經過實驗證明，本系統在不需要多通道相位調制的光訊號下，達到消除光強直流項的目標，並維持良好訊噪比。本系統的量測誤差為量測範圍的0.026%，及0.051%標準差。未來系統之外部(Extrinsic)感測部分微型化後，本系統將具安裝於多軸加工機的潛力。

關鍵字

光纖干涉儀 ； 單頻干涉術 ； 菲佐干涉位移量測系統 ； 電光調制器 ； 相位偵測

並列摘要

In the progress of technology, the demand of high-precision industry for high-precision inspection equipment is getting higher. The demands in industry are mainly from semiconductor manufacturing companies. The equipment with easy machine installation and small volume is needed for precision inspection. Therefore, this research develops a nano-scale fiber-based interferometer. This research will discuss homodyne interferometer’s features and improve the disadvantages by proposed system.
For decreasing effect of homodyne interferometry disadvantages, including DC term and orthogonal property between interferogram signals, this research build a displacement measuring Fizeau interferometer with fiber structure. The fiber components, including collimators, circulators are for easy installation and better expandability. The electro-optical modulator of system raise efficiency of phase modulating. Lastly, the interference signal is received with fiber-coupled detectors, and transfer to computer to carry out the signal processing and phase detection.
As proved by experiments, the developed measuring system can achieve the goal of decreasing DC term of light and maintain good signal to noise ratio with just one detector. This system can detect a distance with 0.026% error and 0.051% measuring standard deviation. After extrinsic sensing part of system is further miniaturized, the developed system can provide an excellent potential measuring tool for multi-axis machining equipment.

並列關鍵字

fiber-based interferometer ； homodyne interferometry ； displacement measuring Fizeau interferometer ； electro-optical modulator ； phase detection

參考文獻

[1] W. Watson & Sons, “Watson interference objective,” product brochure (1962).

[2] D. Malacara, “Chapter 1:Fizeau interferometer,” in Optical Shop Testing third edition, A John Wiley & Sons, Inc., Publication,(2007).

[3] P. B. Clapham, and G. D. Dew, “Surface-coated reference flats for testing fully aluminized surfaces by means of the Fizeau interferometer,” J. Sci. Instrum. 44,pp. 899-902, (1967).

[4] R. P. Netterfield et al., “Coating requirements for the reference flat of a Fizeau interferometer used for measuring from ncoated to highly reflecting surfaces, ”Proc. SPIE 3738 128-135 (1999).

[5] P. de Groot, “Correlated errors in phase shifting laser Fizeau interferometry,”Applied Optics. 53, 4334–4342 (2014).