布拉格光纖光柵感測器於高速內藏式主軸及超精密平面磨床動態特性、溫升及變形之精密量測

Application of Fiber Bragg Grating Sensors to Measuring the Dynamic Characteristics of Built-in High-speed Spindle and Precision Surface Grinding Machine

許詠荏(Tung-Jen Hsu)

指導教授 ： 馬劍清

國立臺灣大學/工學院/機械工程學研究所/碩士(2016年)

https://doi.org/10.6342/NTU201600826

摘要

近年來以布拉格光纖光柵(Fiber Bragg Grating, FBG)作為感測器之研究領域 快速發展,因其具有徑細質輕、高靈敏度以及不受電磁波干擾等優勢,且應用範圍 極為廣泛,若搭配能量調變法可進行動態訊號之量測、搭配分波多工器可進行多點 量測,亦可搭配波長調解器與共振波長飄移理論做定量之量測,許多學者皆致力於 相關領域之研究。而本實驗室過去投入許多精力於光纖光柵相關量測技術之研究 與開發,而本文將應用實驗室已開發完成之光纖光柵量測技術量測高速內藏式主 軸以及超精密平面磨床之轉速,溫升以及熱應變,將光纖光柵感測器應用於實際工 業界相關問題之量測。
本論文主要利用光纖光柵靈敏且精密的感測能力,量測高速內藏式主軸與高 精度磨床之切削與磨削訊號。高速內藏式主軸運轉時振動小且加工精度高,但因排 熱不易,易造成熱變形而影響加工精度,因此量測溫度訊號也極為重要。本文使用 光纖光柵感測系統對運轉中之高速內藏式主軸進行量測,文中提出將裸光纖與套 管光纖黏貼在主軸表面,透過共振波長飄移理論計算將溫度及熱變形訊號解耦合, 直接獲得高速主軸在運轉過程中的溫升及熱變形歷程,最後透過頻域分析量測主 軸轉速,以監測長時間主軸作動訊號、加工過程及健康狀態。而光纖光柵徑細質輕, 將其埋入在主軸內部監測主軸做動狀況,並分別對主軸之內部以及外部進行量測。 最後則針對高速內藏式主軸的特性,利用超光二極體 (Superluminescentdiode,SLD) 當寬頻光源客制化設計出一價格低廉、體積小之光路及量測系統,進行不同轉速作 動之測試並配合埋入主軸內部之光纖進行量測,以達到將光纖光柵感測器埋於主 軸內部並長期監測主軸內部溫升及熱變形之目的。另外,針對實際磨削中之高精度 磨床進行量測,詳細分析真實磨削中的主軸與加工工件之振動,溫升及熱變形。最 後則同時使用套管光纖、裸光纖以及熱電耦,詳細了解磨削訊號的型態與變化,以 達到監測工具機運轉及磨削的目的。

關鍵字

布拉格光纖光柵 ； 感測器 ； 應變 ； 溫度 ； 熱變形 ； 工具機 ； 高速內藏式 主軸 ； 超精密平面磨床 ； 超光二極體光源

並列摘要

Recently, the optical fiber sensors, especially the fiber Bragg grating (FBG) sensors, have been rapidly developed due to the advantages such as excellent mechanical properties, thin geometries, high sensitivity and electromagnetics immunity. It can be applied to static analysis by demodulating the FBG central wavelength or dynamic measurement by power modulated system, and both of them can measure multiple points in the same time with wavelength division multiplexer. FBG sensors measuring systems were developed in our laboratory and this thesis is going to use these techniques to measure industrial machine tools.
The main object of this research is focused on the application of FBG on measuring signals of built-in high-speed spindle and high-presicion surface grinding machine. In the beginning, we used FBG to measure the surface of the spindle, to analyze its vibration signal, and obtained its rotating speed by frequency domain. Then, we tried different methods, such as using thermal grease and Teflon tube, in order to ensure that FBG only measured temperature changes. Further, we used a nude FBG and a tube FBG to measure the spindle simultaneously and developed a method to decouple the signals of vibration, temperature change and thermal deformation. Also, we embedded FBG inside the spindle since the diameter of the fiber grating is small, so that we can use FBG to monitor the inside message of the spindle. In addition, we designed a customized system by using SLD broadband light source, light coupler and CWDM for the spindle measurement to make the FBG measuring system become a commercial product with low price and small size. We also measured the high-presicion surface grinding machine, including including the circumstances in which the spindle was not cutting, and in which the spindle is cutting the workpiece. By measuring the dynamic signals of spindle and the workpiece, we obtained complete information about patterns and changes in cutting period, also achieve he purpose of monitoring the operation of the machine tool and cutting.

並列關鍵字

Fiber Bragg Grating ； strain ； temperature ； thermal deformation ； sensor ； built- in high-speed spindle ； high-presicion surface grinding machine

參考文獻

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