- 學位論文
結合干涉微影術與奈米壓印微影術製作微米-次微米複合結構
Fabrication of Micron and Submicron Compound Structures by Combining Interference Lithography and Nanoimprint Lithography
摘要
由目前的研究文獻中，二維的次波長週期性抗反射結構已經被提出可以同時擁有寬頻而且可容忍大角度入射的抗反射效果，其目的主要是為了要減少入射光接觸介面後的反射率。雖然目前此種技術主要還是被傳統的抗反射鍍膜支配著，但在未來我們必須微小化這些光學元件時，這種次波長抗反射結構的應用將會成為更合適的方法來取代傳統薄膜抗反射處理。而可預期未來的太陽能電池、手機、LCD以及LED的光萃取等光電產業上被大量的使用。 在此論文中，我們會討論以及利用雙光干涉微影術以及一般的半導體製程步驟，將次波長抗反射結構製作在平面矽基板上。而我們可以透過改變離子蝕刻機(RIE)與耦合式電漿離子蝕刻機(ICP)的蝕刻參數在矽晶圓片上蝕刻出各種不同輪廓的次波長結構。然後我們會針對這些不同的結構輪廓對於試片的抗反射效果的影響作討論以及量測。 我們也將一般製作在平面基材上的次波長結構利用我們所提出來的新方法將這個含有結構的平面轉換成微米級的微透鏡上。而我們所提出的方法主要是結合了奈米壓印微影術以及傳統的擠出成型技術把平面結構轉換成微米曲面，因此這種方法是非常簡單而且省時。藉由此方法我們可以把微米級結構與奈米級結構整合在一起形成類似人造的複眼結構。而且我們改裝了一般的商用的光學式顯微鏡，來確定將次波長結構整合到微透鏡上後，抗反射效果仍然是有作用的。
並列摘要
It has been reported that the two dimensional sub-wavelength periodic structures would result in excellent broadband anti-reflection with wide incident angles. Though this technique is not widely used to replace traditional thin film coating presently, it is ex-pected to become a more suitable solution when applied to ever smaller optical elements. However, we could anticipate that this kind of structure will be widely applied to solar cells, LCD displays, and LED light extraction, etc. In this thesis, we will study and fabricate sub-wavelength structures on silicon sub-strates by utilizing two-beam interference lithography and semiconductor process. More-over, by means of reactive ion etching (RIE) and inductive couple plasma (ICP) etching system, different etching recipes to fabricate different sidewalls of the sub-wavelength structures into silicon substrates are obtained. Subsequently, the reflective phenomena of different samples influenced by the sidewall are studied. A novel method is also reported for transferring the sub-wavelength structures from flat surfaces to the curved surfaces of micro lens. This method is to combine the nanoim-print and the hot-extrusive shaping techniques, and it is very simple and time-saving. By using the method, nanostructures can be integrated on microstructures as an artificial compound eye structure. Furthermore, a commercial optical microscope is applied to con-firming the effect of anti-reflection on such a single compound eye structure.