- 學位論文
奈米螺旋碳管之熱感測器與其應用
Carbon Nanocoils for Thermal Sensors and Applications
摘要
本實驗將以奈米螺旋碳管做為感測元件設計溫度感測器，感測器的設計方式主要分為兩種，一種為利用成長好整叢的奈米螺旋碳管做為感測元件，另一種為利用介電泳法排列奈米螺旋碳管於金屬電極間作為感測元件。我們能透過退火處理使接觸電阻穩定。在感測器製做完成後，將感測器放入高溫爐內量測其溫度與電阻關係並計算溫度感測器之溫度電阻係數(TCR)。最後再以量測到的TCR值反推奈米螺旋碳管在吸收電磁波時所造成的溫度上升量。 實驗結果發現奈米螺旋碳管溫度感測器之TCR值分佈於-0.12 %/℃~1.25 %/℃因各個感測器設計而不同，其靈敏度比以奈米碳管作為溫度感測器來的更高。而奈米螺旋碳管吸收電磁波所造成的溫度上升量不到1 ℃。
並列摘要
We use carbon nanocoils as sensing element to design a new thermal sensor device. There are two design of carbon nanocoils thermal sensor. One was using the bundle of carbon nanocoils as thermal sensing element, other was using aligned carbon nanocoils between metal electrode which manipulated by dielectrophoresis. We can stabilize contact resistance by thermal annealing. After fabrication, the sensor sent into the furnace to measure the relationship between temperature and resistance and calculate Temperature coefficient of resistance (TCR) of thermal sensor. Finally, we using TCR value to estimate the temperature change of carbon nanocoil impinged by electromagnetic wave. It was found that the TCR values of the carbon nanocoils thermal sensors distributed in the -0.12% / ℃ ~ 1.25% / ℃ depends on each sensor design, and which have better sensitivity compare to using carbon nanotube as sensing element. Temperature change of carbon nannocoils impinged by electromagnetic wave are below 1 ℃.