雙光子聚合技術之水凝膠材料特徵與快速微製造

Characterization of hydrogel material and fast microfabrication by two-photon polymerization technology

張煒鑫(Wei-Hsin Chang)

指導教授 ： 鐘添東

國立臺灣大學/工學院/機械工程學研究所/碩士(2019年)

https://doi.org/10.6342/NTU201903587

摘要

本文以雙光子聚合技術研究水凝膠材料PEGDA在雙光子微製造中的特性，另以振鏡掃描器及分光繞射光學元件進行大範圍雙光子快速微製造之研究。在PEGDA產品的製作中，使用了532奈米波長之Nd:YAG皮秒雷射和數值孔徑1.3的100倍物鏡。為了要了解PEGDA材料在雙光子微製造之下的線寬，使用了上升掃描法(Ascending scan method) 和懸吊橋樑法 (Suspending bridge method)，得到在不同雷射能量和曝光時間所製作之線的長短軸比，由此結果即可以精準的製作三維微結構。在ORMOCOMP®材料的快速微製造中，使用了515奈米波長之飛秒雷射、xy方向之振鏡掃描器、z軸壓電平台、數值孔徑0.8的50倍物鏡、5 x 5分光繞射光學元件以及xy平面移動平台等設備，製作了一個數量100 x 100之菲涅耳透鏡 (Fresnel zone plate lens) 陣列，製作時間為70分鐘，其面積範圍為3.32mm x 3.32mm、精度為0.67µm。由光學測試結果可得其具有良好的聚焦和成像品質。

關鍵字

雙光子聚合 ； 雙光子吸收 ； PEGDA ； ORMOCOMP ； 振鏡掃描器 ； 分光繞射光學元件 ； 菲涅耳透鏡

並列摘要

This thesis studies the characteristics of hydrogel material polyethylene glycol diacrylate (PEGDA) in microfabrication using two-photon polymerization (TPP) technology. Fast microfabrication of large area TPP products are also studied by using galvanometer scanner with diffractive optical element (DOE). For fabrication of PEGDA products, a 532nm wavelength Nd:YAG picosecond laser and a 100x objective lens with numerical aperture (NA) 1.3 are used. For finding the PEGDA line width in TPP fabrication, two experimental methods, ascending scan method and suspending bridge method, are used. Different aspect ratios of line dimension with different laser power and exposure time can be obtained. It is used in precision fabrication of 3D micro structures. For the fast fabrication using ORMOCOMP® material, a 515nm wavelength femtosecond laser, a xy galvanometer scanner, a z-axis piezo stage, a 50x objective lens with NA 0.8, a 5 x 5 DOE, and a xy planar translation stage are used. A Fresnel zone plate (FZP) lens array with 100 x 100 lens number is rapidly fabricated in 70 minutes. The FZP lens array has area size of 3.32mm x 3.32mm with a resolution of 0.67 µm. From the optical test, it shows good focusing condition and imaging quality.

並列關鍵字

Two photon polymerization ； two photon absorption ； PEGDA ； ORMOCOMP ； galvanometer scanner ； diffractive optical element ； Fresnel Zone Plate

參考文獻

References

[1] E Käpylä1, S Turunen1, J Pelto1,2, J Viitanen2 and M Kellomäki1, " Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer–ceramic hybrid material," J. Micromech. Microeng. 2011.

[2] M. Göppert-Mayer, "Über Elementarakte mit zwei Quantensprüngen," Annalen der Physik, vol. 401, no. 3, pp. 273–294, 1931.

[3] W. Kaiser, and C.G.B. Garrett, "Two-Photon Excitation in CaF2:Eu2+," Physical Review Letters,vol. 7, no. 6, pp. 229-231, 1961.

[4] K.-S. Lee, D.-Y. Yang, S. H. Park, R. H. Kim, "Recent developments in the use of two-photon polymerization in precise 2D and 3D microfabrications," Polymers for Advanced Technologies, vol. 17, no. 2, pp. 72-82, 2006.