低溫砷化鎵嵌入矽微碟之全光開關

All Optical Switching in Low-Temperature-GaAs-Embedded Si Microdisk Resonators on Silicon-on-Insulator Substrate

陳彥儒(Yen-Ju Chen)

指導教授 ： 毛明華

國立臺灣大學/電機資訊學院/電子工程學研究所/碩士(2016年)

https://doi.org/10.6342/NTU201603739

摘要

在本論文中，我們利用模擬軟體輔助設計將低溫砷化鎵(LT-GaAs)嵌入矽微碟共振腔以做為全光開關(All Optical Switches)，並透過分子束磊晶系統(Molecular Beam Epitaxy System)、電子束二曝技術與製程技術成功的在絕緣層覆矽基板上製作了該元件，最終透過光學量測驗證開關效能。
在本實驗中，由林浩雄老師的分子束磊晶系統所成長之低溫砷化鎵薄膜，其載子生命期可短至288飛秒，為本實驗室載子生命期最短之材料，且克服高溫成長之砷化鎵應用於元件上之困難。實際成長於絕緣層覆矽溝槽中的低溫砷化鎵載子生命期則為520飛秒。
最終我們成功實現了嵌入低溫砷化鎵之矽微碟共振腔，直徑為13微米，其Q值可達8000，並將該元件應用於全光開關上。最終得到開關之開啟與關閉(Switch on, Switch off)的時間分別為544ps與464ps，而載子生命期為342ps。為了驗證低溫砷化鎵的是否能加快開關速度，我們另外製作矽微碟全光開關。透過兩組實驗數據比較，佐證了矽微碟全光開關之開關時間因填入低溫砷化鎵而有大幅的降低。

關鍵字

低溫砷化鎵 ； 微碟共振腔 ； 全光開關 ； 激發-探測 ； 光學量測

並列摘要

In this thesis, we design Low Temperature GaAs Embedded Micro-Disk Resonators on Silicon-on-Insulator Substrate for all optical switches based on simulation. We successfully fabricate such devices by using Molecular Beam Epitaxy System and techniques of E-beam second exposure and verify its efficacy by optical measurement.

In our experiment, we successfully deposit Low Temperature GaAs by Molecular Beam Epitaxy System of MBE Lab. The carrier lifetime of Low Temperature GaAs thin film is as short as 288fs, which is the material with the shortest carrier lifetime in our laboratory. We use Low Temperature GaAs to solve the problem of device implementation on High Temperature GaAs. Its lifetime can be 520fs, when we practically embed Low Temperature GaAs in the Silicon trench.

Finally, we successfully embed Low Temperature GaAs in Si microdisk with 13μm diameter. Low Temperature GaAs embedded microdisk resonator, and its quality factor is 8000. We apply it to optical switches. Its switch-on and switch-off time are 636ps and 440ps, and its carrier lifetime is 342ps. We also fabricate Si microdisk to verify whether it successfully accelerate our switches. By comparing experiment data, we verify that LT GaAs embedded Si microdisk is faster than Si microdisk as optical switches.

並列關鍵字

Low-temperature GaAs ； Microdisk resonators ； All optical switches ； Pump probe measurement ； Optial measurement

參考文獻

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