新型非軸承轉動之光學掃瞄伺服系統設計

Servo Design of a Novel No Bearing Rotating Optical Scanning System

杜維謙(Wei-Chien Tu)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.00825

摘要

本篇論文提出一種新式的光學掃瞄機構以及架設於上的伺服控制系統。此光學掃瞄機構採用壓電致動器做為掃瞄動作的驅動源，並利用壓電材料本身快速反應的特性搭配我們設計的伺服控制器以達到高速以及高解析度的掃瞄。經過我們創新的機構設計，此光學掃瞄機構可以達到±0.790的掃瞄範圍，而在掃瞄控制器方面，我們分別針對重複控制以及反覆學習控制兩種控制器在週期性參考輸入條件下做過誤差響應的比較，最後並整合兩種控制器的優點將之整合成為單一控制器，利用切換的方式得到最佳的掃瞄表現。

關鍵字

光學掃瞄機構 ； 壓電致動器 ； 重複控制 ； 反覆學習控制

並列摘要

This thesis proposes a novel optical scanning device for high speed large angle optical scanning. The traditional approaches include spinning prism and piezoelectric mirror. The mechanism based approach achieves large scanning angle but are slow in response; the piezoelectric drives are fast response, however, they have very limited strokes. The novel design in this thesis combines the strength of a smart mechanism with the piezo-drive to achieve high speed response with fairly large scanning angle. This thesis also looks into the iterative learning control (ILC) algorithm for mirror scanning. To avoid oscillation build up, this thesis introduces a switching algorithm to effectively suppress the initial low frequency oscillation. Due to the continuous scanning natural, the high frequency tracking error also tends to accumulate under prolonged ILC operation. This thesis investigates the alternative repetitive control (RC) and proposes a cascaded control to quickly suppress the initial low frequency oscillation and then to maintain a suppressed tracking error.

並列關鍵字

Optical Scanning System ； Piezoelectric Actuator ； Repetitive Control ； Iterative Learning Control

參考文獻

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