- 學位論文
微型三次元量測儀之結構改良與自校正方法之研究
Structural Improvement of Micro Coordinate Measuring Machine And Research of Self-Calibration
摘要
本論文為進行微型三次元量測儀之結構改良，將量測儀各自完成之硬體加以整合，並修改三次元軟體配合使用以進行微型三次元量測儀的實際量測，最後提出一維自校正的理論與模擬結果。 文中將介紹微型三次元量測儀之各硬體部分，包括共平面平台、Z軸、探頭及感測器，感測器包含作為位置回授的線性繞射光柵干涉儀 (LDGI)以及多自由度量測系統(MDFS)。 研究中透過重新設計以及組裝微型三次元量測儀之結構以提升平台定位之精度，並以雷射干涉儀確保平台定位精度；此外，藉由MDFS量測平台運行時之角度，以消除量測時阿貝誤差造成的影響；驅動平台校正探頭矩陣，並經由此矩陣轉換得出球頭座標；各元件準備完整後，進行量測儀之實際量測，以及一維自校正理論推導。
並列摘要
This research focuses on the system integration and a new structure design of micro coordinate measuring machine (Micro-CMM). All units of Micro-CMM which were developed are integrated together. In addition, a set of CMM software is also programmed for measuring process, and a one dimensional self-Calibration method is also presented in this research. Each unit of Micro-CMM would be introduced in the paper, including Co-planar stage, Z axis, probe and all the sensors, which include laser diffraction grating interferometer (LDGI) and Multi degrees of freedom sensors (MDFS) as position feedback. To improve the accuracy of Micro-CMM, a new design and assembly process are described in this research, and a Laser interferometer is also used to make sure the Micro-CMM meet the accuracy requirement. The Abbe’ error during measuring process can be eliminated through the angular detection of MDFS. Besides, a probe matrix needs to be calibrated to transform the probe signals into three dimensional displacements of the probe tip. After all the units are integrated, the actual measurement of Micro-CMM is completed, and a one dimensional self-Calibration method is also presented in the end of this research.