應用田口方法於晶圓盒門體閂鎖機構之磨耗分析

Application of Taguchi Method in Wear Analysis of Latching Mechanism For the Wafer Container Door

林耀馨(Yao-Zhin Lin)

指導教授 ： 李志中

國立臺灣大學/工學院/機械工程學研究所/碩士(2009年)

https://doi.org/10.6342/NTU.2009.01457

摘要

本論文之目的為改善晶圓盒門體閂鎖機構之磨耗，以保持晶圓盒內為高潔淨度，確保不會對積體電路製程產生污染，而降低了產品製程良率。本研究應用田口方法求取晶圓盒門體閂鎖機構之磨耗的最佳因子組合。田口方法在產品或製程設計時就有考慮雜訊對品質特性的影響，亦即能降低產品的變異，使得產品或製程更具穩健性。田口方法使用訊號雜訊比及變異數分析來探討各因子對於晶圓盒門體閂鎖機構之磨耗的影響程度。本研究中所探討的因子為導引件曲線、從動件滾子直徑、凸輪基圓半徑、凸輪升程角度、凸輪升程曲線、凸輪降程曲線、凸輪前端暫停角度及凸輪後端暫停角度。實驗結果顯示磨耗主要受凸輪基圓半徑與凸輪升程曲線兩個重要因子的影響。本研究設計的最佳因子組合，其實驗結果顯示磨耗有明顯的改善。

關鍵字

閂鎖機構 ； 磨耗 ； 田口方法 ； 穩健 ； 訊號雜訊比 ； 變異數分析

並列摘要

The purpose of this study is to investigate the wear of the latching mechanism used in the wafer container door. The wafer container provides the wafers a highly clean mini-environment for storage and transporting such that they will not be contaminated during the manufacturing process. This research discusses parameter optimization of the latching mechanism for the wafer container door by Taguchi method based design of experiments to understand how the variation in product specifications affects the system performance. Taguchi method is the robust design that enables the designer to find the optimum combination of control parameters to make the response insensitive to noise factors. The method uses signal to noise ratio and analysis of variance to investigate the contribution of each factor to wear of the latching mechanism for the wafer container door. In the method, eight control factors：curve of guide, radius of roller follower, radius of base circle, cam angle for rise, cam profile for rise, cam profile for return, cam angle for forward dwell, and cam angle for backward dwell are considered. Experimental results demonstrate wear is mainly affected by the factors of radius of base circle and cam profile for rise. The results also show that a distinct improvement over the wear of the latching mechanism can be achieved.

並列關鍵字

wear ； latching mechanism ； Taguchi method ； robust design ； signal of noise ratio ； analysis of variance

參考文獻

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