生產排程與保養整合–離子植入設備之生產排程

Integrating Production Scheduling and Maintenance -Ion Implantation Area Scheduling

王瀷平(I-Ping Wang)

指導教授 ： 周雍強

國立臺灣大學/工學院/工業工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.01598

摘要

離子植入區是半導體晶圓製造的重要製程步驟，其製程類別選擇排序的特點是不同種類的在製品批量順序會直接影響機台失效率的消長，故生產規劃決策即是機台維修保養工作。國內企業為了追求生產上的效率，往往忽略了機台維修保養的重要性，沒有同時將兩者整合，太早進行預防保養會增加設定轉換時間,而太晚進行則會需要長時間的機台修復，所以整合維修保養與生產排程是高科技製造業的重要決策。
本研究的主要目的是先建構離子植入區機台的可靠度模式，並且比較兩種風險態度下製程類別選擇排序行為，其次分析不同工作負載下最佳製程選擇排序的趨勢，最後比較在非等效平行機台系統下是否同時考量機台維修保養下的兩種製程類別排序方法，並提供跨生產區整合的最佳在製品種類到達比例指導方針，期望達到優化垂直製造鏈整合的效果。
本研究的主要貢獻是找到最佳製程選擇排序的規律，不同種類在製品工作負載相差很大時，失效率在前面維持很低，最後呈現會有上升的趨勢。藉此得到跨區整合下的最佳在製品種類到達組合，可以有效減少期望失效時間累積。此外，在非等效平行機台下，當機台維修時間與設定轉換時間的比值越大時，越建議採用整合維修保養與生產效率的製程類別選擇方法。

關鍵字

機台排程 ； 生產與保養排程 ； 離子植入 ； 半導體製造 ； 可靠度 ； 失效率

並列摘要

Ion implant area is one of the most important processes in semiconductor fabrication industry. The characteristic of this area is that the sequence for different kind of WIP type would affect the variation of machine failure rate.This means the scheduling decision making is just machine maintainance work. Many companies only pursue production efficiency but ignore the importance of maintainance work.We should integrate them simultaneously, early timing for maitainance work would increase machine program setup-change-over time. On the contrary, late timing for maintainance work require long machine repair time penalty. In conclusion, integrating both is the urgent decision for high technology to execute .
The research goal is first to construct the unique reliability mode for the machine, comparing scheduling methods based on two kinds of risk manner.Second,analysis the optimal scheduling trend for two kind of WIP type workloads . Finally,to compare two scheduling methods whether concerns about maintaince work or not,suggesting the the most robust one for enterprises, and provides optimal job type-mix arrivals for cross-area integration.
The contributions of this research are that we find an optimal scheduling pattern for ion implant area, when the difference between two kind of WIP type workloads is large ,optimal sequence will keep the failure rate in a low level , but increase in the end .From this trend ,we get the optimal job type-mix arrival that every type WIP comes evenly.Besides,when the ratio of machine repair time and setup change-over time is lagre in the NIPM system, we suggest to choose the method that integrate production efficiency and machine maintainance work simultaneously.

並列關鍵字

Machine scheduling ； production and maintenance scheduling ； ion implantation ； semiconductor manufacturing ； reliability ； failure rate

參考文獻

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