形成因子對於生物分子感測元件影響之探討

近年來利用奈米線電晶體做為新的生物分子分析被大家認為是未來可以用來做為檢測疾病的良好工具，除了可以在短時間量測到生物分子訊號外，同時也具有高靈敏度、高選擇性、體積小以及可大量生產的優點。但是這項新技術尚有許多問題需要克服，其中又以穩定性及靈敏性為兩個最廣泛討論的特性，改進的方法大致上可分為三種，一種是環境的改變，一種是元件結構上的改進，最後一種是製程方面的進步。　　本論文中做了兩大方面的討論，第一個討論是針對不同結構去討論，包含單根奈米線、多重奈米線以及粗奈米線的比較。第二個討論是比較在源極與汲極做不同離子濃度摻雜的元件的差別，比較在不同種類生物分子感測器上元件電性改變的不同。為了要驗證本論文欲達到的目的，各種元件皆製做完成及經過實驗上的驗證。做出的矽奈米線薄膜場效電晶體先經過生物修飾化來使元件具有對特定生物分子的接合能力，如此進行DNA濃度的測試。利用臨界電壓的改變去分析單晶矽奈米線電晶體生物分子感測器的靈敏度以及穩定性。由兩種分析的結果可知，本論文可以清楚比較各種結構及S/D不同離子濃度的元件在生物分子感測時所帶來的影響。

關鍵字

奈米線生物分子感測器

並列摘要

In recent years, the use of nanowire transistors as a new bio-molecular measurements device has became a good tool in the detection of the disease. This new biosensor could measure bio-molecular signals in a short time, also provides the advantages of high sensitivity, high selectivity, small size and probability to mass production. However, there are still some problems in this new technology need to be overcome, especially the stability and sensitivity characteristics which are the two most widely discussed. The improved methods can be broadly divided into three types, one is bio–abio interface, one is the device structure improvements, and the last one is fabrication technique. There are two parts of discussion in this paper, the first discussion is to discuss the different structures consists of single-nanowire, multiple-nanowires and ribbon- nanowire. The second discussion is to discuss the difference between heavy ion implantation in S/D device and normal ion implantation device. Both discussions are focused on the comparison of the different bio-molecular sensing properties in these two devices. To verify the purpose of this thesis wants to achieve, the various devices are fabricated and experimentally verified. The silicon nanowire thin-film transistor is bio-functionalized to have the specific-binding to testing DNA strands, so the DNA concentration of the test. Then we use the change of the threshold voltage to analyze the sensitivity and stability of bio-molecular sensor of silicon nanowire transistors. By the two analytical results, this paper can clearly demonstrate the effect of the comparison of different structure and different ion concentration in biomolecular sensing.

並列關鍵字

Silicon nanowire biosensor

參考文獻

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形成因子對於生物分子感測元件影響之探討

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