圖案化藍寶石基板對發光二極體之影響

The influence of nano-patterned sapphire substrate in InGaN-based light emitting diodes

陳柏勳(Po-Hsun Chen)

指導教授 ： 管傑雄

國立臺灣大學/電機資訊學院/電子工程學研究所/碩士(2013年)

https://doi.org/10.6342/NTU.2013.10731

摘要

成長在藍寶石基板上的氮化鎵發光二極體，會因為與藍寶石基板的晶格常數差異、熱膨脹係數不同，而對元件產生量子侷限化史塔克效應，使氮化鎵發光二極體發光效率下降。因此本篇論文想藉由在藍寶石基板上製作奈米圖案，探討對氮化鎵發光二極體造成的影響。吾人使用電子束微影系統搭配濕式蝕刻技術，製作出不同週期、不同基板佔有比例的奈米結構，並使用有機金屬化學氣相沉積系統進行氮化鎵磊晶。其後使用拉曼光譜系統確認磊晶品質，光致激發螢光系統量測主動層發光特性，最後使用低溫系統量測內部量子效率。

關鍵字

氮化鎵發光二極體 ； 圖案化藍寶石基板 ； 電子束微影 ； 量子侷限史塔克效應 ； 奈米結構

並列摘要

Growth of GaN-based light-emitting diodes on sapphire substrates , because of the differences between the lattice constant and thermal expansion coefficient , resulting in Quantum-Confined Stark Effect , reducing the LEDs efficiency. Therefore, this paper would like to be contacted by the production of nano-patterned sapphire substrates to explore on the GaN light emitting diodes impacts. I use e-beam lithography system with wet etching techniques to produce different periods, different substrate ratio nanostructures and use of metal organic chemical vapor deposition system for GaN epitaxy . Subsequently confirmed using Raman spectroscopy system to exam epitaxial quality, photoluminescence (PL) system active layer photoluminescence measurements, the last measurement using cryogenic system internal quantum efficiency.

並列關鍵字

Light-emitting diode ； QCSE ； MOCVD ； NPSSs ； Electron-beam lithography ； Wet-etching

參考文獻

InGaN Blue , Green and Yellow Light-Emitting Diodes with Quantum

Well Structures “,Jpn. J. Appl. Phys. 34, L797(1995).

[4] W.K. Wang, D.S. Wuu, S.H. Lin, P. Han, R. H. Horng, T.C. Hsu, D.T. Huo,M.J. Jou, Y.H. Yu, and A. Lin, “Efficiency Improvement of Near-Ultraviolet InGaN LEDs Using Patterned Sapphire Substrates “, IEEE Journal of Quantum ELECTRONICSElectronics, Vol. 41, NO. 11, NOVEMBER (2005)

[5] H.W. Huang, C.C. Kao, J.T. Chu, H.C. Kuo, S.C. Wang, and C.C.Yu, “Improvement of InGaN–GaN light-emitting diode performance with a nano-roughened p-GaN surface,” IEEE Photonics Technology Letters,

Vol. 17(2005), pp.983