陣列式石英晶體微天平測量器之設計與開發

Design and Development of Array Type Quartz Crystal Microbalance

施宣寧(Hsuan-Ning Shih)

指導教授 ： 吳光鐘

共同指導教授 ： 李世光(Chih-Kung Lee)

國立臺灣大學/工學院/應用力學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.01040

摘要

開發出高穩定性、靈敏性、快速性、便利性的生物檢測平台是所有從事相關生物檢測研究人員共同的理念。石英晶體微天平測量器 (QCM) 為一種高靈敏度、選擇性及穩定性之感測元件，近年來也成為一種廣泛研發之生物感測器。若能將QCM微型陣列化，便能大大提昇QCM的快速性，這對QCM在生醫檢測之應用會是一大進展。
本研究利用電腦輔助設計軟體（ANSYS）建立一套設計多通道石英晶體微天平測量器之方法，提供一套低成本且快速之設計研發方法。
除此之外，本論文同時利用微機電之製程方法在石英上做加工以解決石英震盪器不易微小化等之問題。並且將利用電腦輔助設計軟體所設計出的雙通道QCM給實體化，經由實驗驗證後，證實利用本研究所提出之設計方法可建構出一套可平行檢測生物樣本之多通道石英晶片。

關鍵字

石英晶體 ； 有限元素法 ； 陣列式,

並列摘要

The desirable purpose of the bio-detective researchers is a highly stable, highly sensitive system that is high speed and easy to use. As Quartz crystal microbalance (QCM) satisfies all of the above-mentioned properties, it is now widely applied in many biotech analytic fields.
This thesis sets up a method to pursue optimum design of array type QCM by using numerical packages (ANSYS) so as to provide a low cost and high efficiency design and development.
In addition, two-channel QCM was fabricated by using microfabrication technology in order to circumvent the difficultly in fabricating miniature devices on quartz substrate by using traditional manufacturing methodologies,. After systematic testing, it is verified that the methods developed in this thesis can lead to the successful development of a miniature array type bio-QCM sensor system.

並列關鍵字

QCM ； ANSYS ； array

參考文獻

[1] 詹家銘, "圓偏光表面電漿子干涉儀之研製," 國立臺灣大學應用力學研究所碩士論文, 2006.

[4] G. G. Guilbault, "Determination of Formaldehyde with an Enzyme-coated Piezoelectric Crystal Detctor," Analytical Chemistry, vol. 55, pp. 1682-1684, 1983.

[6] P. J. Cumpson and M. P. Seah, "Quartz Crystal Microbalance; Radial/polar Dependence of Mass Sensitivity both on and off the Electrodes," Measurement Science & Technology, vol. 1, pp. 544-555, 1990.

[7] F. Josse, Y. Lee, S. J. Martin, and R. W. Cernosek, "Analysis of the Radial Dependence of Mass Sensitivity for Modified-electrode Quartz Crystal Resonators," Analytical Chemistry, vol. 70, pp. 237-247, 1998.

[9] Y.-K. Yong and J. T. Stewart, "Mass-frequency Influence Surface, Mode Shapes, and Frequency Spectrum of a Rectangular AT-cut Quartz Plate," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 38, pp. 67-73, 1991.