新型三自由度超音波馬達之研究

隨著科技的發展，傳統的電磁馬達開始無法滿足在生醫方面之應用，而具有微小化、輕量化、反應快速及高轉矩等優勢的超音波馬達漸漸在此領域展露頭角，本研究提出一新型三自由度球型超音波馬達(SUSM)，利用四個位置分別相差90度角的積層式壓電材料，輸入有60度、75度、90度、105度相位差的正弦波組合而使其上金屬彈性體產生有順序性的傾斜與平移，進而合成可使超音波馬達有Θx、Θy、Θz方向的轉動。並且為了增進此超音波馬達的驅動效率，我們也進行了超音波馬達本體與預壓機構的共振頻率的量測。並由量測結果發現，各軸向轉動的最大轉速分別為：X軸轉向，在22 V，24 kHz，相位差105度下具有正轉(Θx)每秒129.01度，反轉(-Θx)達到每秒130.19度；Y軸在22 V，24 kHz，相位差105下具有正轉(Θy)每秒127.35度，反轉(-Θy)達到每秒125.74度；而Z軸轉向在22 V，24 kHz，相位差90度時，正轉(Θz)每秒129.85度，反轉(-Θz)達到每秒128.14度，且可看出22 V，24 kHz下，X、Y轉向之輸入相位差為105度，Z軸轉向之輸入電壓為90度時，三個軸的轉速非常相近，此對於實際上的應用有相當大的優點，如簡化驅動信號的電路與縮小控制系統的體積等。最小驅動電壓分別為Z軸10 Vpp, X、Y軸 12 Vpp。結果顯示此SUSM非常適合需要扁平化與低驅動電壓之場合：如監視器或機械手臂等應用。

關鍵字

超音波；三自由度；壓電材料；機械眼；球型馬達

並列摘要

Ultrasonic motor with the advantages of small size, light weight, and quick response ability become more and more popular. We design a novel 3 d. o. f. spherical ultrasonic motor (SUSM), which has 4 multi-layer piezoelectric actuators (MLPAs) in each direction of positive or negative X and Y axis. Utilize the inclined motion when we input a set of sin waves (2 sine waves and each has 60, 75, 90, or 105 degrees phase difference), and combine those motions could make Θx、Θy、Θz rotations. For achieve the best performance, we measure the vertical, horizontal vibration and phase delay of the friction tube. Using this information, we can obtain the oval trajectories of the friction tube at different frequency. Compare the shape, vibration amplitude, and frequency range, of these oval trajectories, we found the best operating frequency of this SUSM is 24 kHz. All rotation speeds of each axis have been measured by experiment. The maximum angular velocity of each axis is: For X axis, at 22 V, 24 kHz, 105 degrees phase delay, ωx reach 129.01 degrees/sec, -ωx reach 130.19 degrees/sec; also For Y axis, at 22 V, 24 kHz, 105 degrees phase delay, ωy reach 127.35 degrees/sec, -ωy reach 125.74 degrees/sec; at 22 V, 24 kHz, 90 degrees phase delay, For Z axis, ωz reach 129.85 degrees/sec, -ωz reach 128.14 degrees/sec. Experiment result shows the angular velocity in each axis is very close to each other, which can simplify the input signal and reduce the volume of the control system. The minimum operating voltage is 10 Vpp in Z axis, 12 Vpp in X and Y axes. It shows that this SUSM has high potential for camera and robotic arms or other applications which need compact, flat mechanism, and low voltage.

並列關鍵字

ultrasonic ； 3 DOF ； piezoelectric material ； robotic eye ； spherical motor

參考文獻

[14] 楊晨暉, “雙層壓電式超音波馬達之研究,” 國立台灣大學機械工程研究所碩士論文, 2005.

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[5] Xiaofeng Zhang, Yasuyuki Gouda, Daisuke Koyama, Kentaro Nakamura and Sadayuki Ueha, “A basic design of robot finger joint using multi-degree-of-freedom ultrasonic motor,” Acoustical Science and Technology, No. 29, Issue 3, pp235-237, 2008.

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新型三自由度超音波馬達之研究

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