摘要
在本論文中，我們利用紅光He-Ne雷射波長633nm，藉由控制高精度奈米壓電移動台，以及高倍率高數值孔徑的油鏡(100x, NA：1.4) 將雷射光聚焦至相變化薄膜Ge2Sb2Te5，我們可以控制奈米移動台在相變化薄膜上寫下結晶態的二維結構，從實驗結果我們製備圓陣列、開羅結構、二維螺旋結構、西洋棋盤結構。 同樣的實驗架構我們可以改變光源，改成超快脈衝光源，利用雙光子吸收的非線性光學效應，由於光源對於商用光聚合樹脂的具有良好的三維選擇性，可以使用光聚合樹脂或是光阻製備出任何三維結構；再藉由材料的改良可以製備出金屬的二維結構，而金屬的三維結構是目前尚需努力的目標。 此方法可以應用在奈米電漿超穎材料方面的研究，除了對於目前科學研究，未來也許可以藉由本方法製備出商業化的表面電漿的光學元件或裝置。
並列摘要
In this thesis, we use the helium-Neon laser with wavelength 633nm, and focus the laser to phase-change thin film Ge2Sb2Te5 by high magnification and high number aperture oil objective lens(100x, NA：1.4). By controlling the high precision piezo nano-stage, we can fabricate any crystalline two-dimensional structure. The experimental results shows that we can fabricate the circle array, chiral structure, 2-D spiral structure, and checker board structure. By using the same experimental setup, we replace the red light laser with femto-second pulse laser. We can use non-linear optical effect ,two-photon absorption. Because the light source have good three dimensional spatial selectivity for commercial photo-polymerization resin, we could manufacture any three dimensional structure. We also can improve the material to fabricate the two-dimensional metallic structure. It is a challenge to fabricate the three dimensional metallic structure. This method can apply to the research of Plasmonic Meta-material , and maybe it is a tool to fabricate the commercial plasmonic optical device in the future.
參考文獻
[1]黃鴻基，“奈米金棒波導之表面電漿振盪與訊號傳遞”，博士論文，台灣大學物理學研究所（2007）
[11] R. Zallen, “The Physics of Amorpous Solids”, John Wiley and Sons, New York (1983)
[12]T. Ohta, “Phase-Change Optical Memory Promotes the DVD Optical Disk”, J. Opt. Adv. Mat. 3, 609 (2001)
[13]徐豪汶，“鍺銻碲相變化奈米薄膜之奈米尺度光熱性質的究”，碩士論文， 中央物理研究所 (2006)
[14]G. F. Zhou, H. J. Borg, J. C. N. Rijpers, and M. Lankhorst, “Crystallization behavior of phase change materials: comparison between nucleation- and growth-dominated crystallization”, Optical Data Storage, 2000. Conference Digest, (2000)
延伸閱讀
- 陳衍方（2011）。奈米結構材料之表面光電位研究〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2011.10883
- Hsu, S. Y. (2012). 奈米結構薄膜之製備與光電元件應用 [doctoral dissertation, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2012.10212
- Chen, J. Y. (2013). 奈米磁性與半導體材料複合元件之光電特性研究 [doctoral dissertation, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2013.10208
- Yatsui, T., Jagadish, C., & Lerondel, G. (2015). Nanophotonics: Fabrications and Application of Nanoscale Optics to Novel Photonic Devices. Advances in Optical Technologies, (2015), f1-1. https://doi.org/10.1155/2015/609682
- Lien, D. H. (2015). Nanophotonics for Low-dimensional Materials [doctoral dissertation, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2015.10637