摘要
本論文利用兩種不同擋罩式輔助奈米螺旋碳管的成長，分別限制其成長空間與催化劑大小和區域，成功獲得尺寸均一性較高之奈米螺旋碳管，並和未使用光罩輔助成長之奈米螺旋碳管做比較。 以陽極氧化鋁薄膜輔助化學氣相沉積法合成奈米螺旋碳管，將螺旋碳管的外徑控制在100∼500 nm，螺距在100∼500 nm，線徑在60∼260 nm之間，其各項特徵尺寸比起未使用陽極氧化鋁薄膜輔助之前平均少了一半；而使用奈米球微影術輔助奈米螺旋碳管成長，催化劑區域被成功限制在130 nm以下，所獲得之奈米螺旋碳管線徑介於20∼60 nm之間，整篇論文的成長結果由掃描式電子顯微鏡和穿透式電子顯微鏡觀察與統計。
並列摘要
In this work, we utilized two different masks to assist synthesizing carbon nanocoils, confining the space of growth and area of catalyst separately. We have successfully obtained carbon nanocoils with superior uniformity by these two novel method. Synthesizing carbon nanocoils with catalytic thermal chemical vapor deposition assisted by removable anodic aluminum oxide membrane. We obtained uniform carbon nanocoils below the membrane which has coil diameter between 100 ~ 500 nm, pitch between 100 ~ 500 nm, and fiber diameter between 60 ~ 260 nm, both were decreased 50 percent compared with those growth without the membrane. We also utilized nanosphere lithography to assist synthesizing carbon nanocoils. The catalyst was controlled under 130 nm, and obtained carbon nanocoils of line diameter from 20 to 60 nm. The results were observed and estimated by scanning electron microscope and transmission electron microscopy.
參考文獻
延伸閱讀
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