AOI機台之結構最佳化與熱補償設計

Structural Optimum Design and Thermal Compensation Design of an AOI Machine Structure

馬嘉宏(Chia-Hung Ma)

指導教授 ： 鍾添東

國立臺灣大學/工學院/機械工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.02192

摘要

本文主要探討高精度自動化光學檢測(automatic optical inspection, AOI)機台結構的最佳化設計與熱補償設計。首先，介紹一種現有的AOI 機台結構，並發展一套參數化實體模型繪圖程式以自動化更新此機台結構模型之主要設計參數。接著透過有限元素分析(finite element analysis, FEA)與實驗，得到此機台之結構特性。現有機台結構之各種結構響應(structural response)，諸如機台底座與檢測模組之變形量等，便可經由分析取得。一整合型最佳化程式亦被提出。此程式包括了四個部份：實體模型產生、有限元素分析模擬、行為響應近似模型產生與最佳化數值搜尋等。利用此整合型最佳化程式，對此AOI 機台之底座結構與移動件分別進行最佳化設計。此最佳化之結果，將可改善底座結構與移動件之結構特性，如結構剛性增強與輕量化等。另經由溫度分佈實驗得到機台於工作達到穩態時之溫度分佈，便可利用有限元素分析得到機台之熱變形情形。最後提出一熱補償設計，來改善此熱膨脹變形情形。

關鍵字

自動化光學檢測 ； 結構最佳化設計 ； 有限元素分析 ； 熱補償設計

並列摘要

This paper studies the optimum design and thermal compensation design of a high precision automatic optical inspection (AOI) machine structure. First, the structure of AOI machine is introduced. A parametric program for AOI machine is developed to generate solid models of the AOI machine automatically. Then, structural characteristics of the AOI machine are analyzed by the finite element analysis (FEA) and obtained by experiments. Structural responses, such as deformation of the base frame and inspection lens tip, of the original structure are analyzed. An integrated program is also developed by combining solid model generation, FEA simulation, response approximation and numerical optimization searches. Using this integrated program, optimum design of the machine base and moving parts of AOI machine are conducted. The results of optimum design improve the structural characteristics of the AOI machine structure. After the temperature distribution experiment, the thermal deformation of the AOI machine can be analyzed by FEA. Finally, a thermal compensation design is proposed to compensate this thermal error.

並列關鍵字

Automatic optical inspection ； structural optimum design ； finite element analysis ； thermal compensation design

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