自動化大範圍之雙光子聚合微製造系統

本文提出自動化大範圍之雙光子聚合微製造系統，此製造系統含有增進微加工品質與效率之功能。首先，安裝行程100微米之3D壓電平台於行程30mm之XY平台上，並開發軟體控制兩平台進行大範圍之微製造。由於自動對焦之精度對於大範圍加工甚為重要，於是藉由調整CMOS相機以增進自動對焦之性能。然後，藉由製造微彈簧陣列、微針頭陣列、菲涅耳透鏡陣列等展示了自動陣列加工之功能，並以軟體修正壓電平台在加速與減速時造成的加工缺陷。此外，為了加速生產，測試了可將雷射光束分散成3X3光束陣列之繞射光學元件，藉由此元件可同時加工出3X3陣列之結構。最後，建構了可加工出大範圍2.5D結構的掃描法，藉由驅動移動平台來回掃瞄並搭配壓電平台進行傾斜校正，成功加工出2.5D的結構，例如光學光柵、網格結構、傾斜式光柵等。

關鍵字

雙光子聚合；雙光子吸收；微加工；自動對焦；陣列加工；繞射光學元件

並列摘要

This thesis proposes an automatic large area micro manufacturing system for two-photon polymerization (TPP). This manufacturing system consists of several functions for improving the quality and efficiency of micro-fabrication. First, a 100 micro meters short range 3D piezo stage is fixed on top of a 30 mm long range XY stage, and a software is designed to control both of the two stages for large area micro manufacturing. For fabricating over large area, the precision of autofocus becomes more important. Therefore, optimizing the CMOS camera for enhancing performance of autofocus is carried out. Then, the automatic array fabrication is demonstrated by fabricating micro-spring array, micro-needle array, and Fresnel zone plate array. Some fabrication defects from acceleration and deceleration of piezo stage are corrected by software. Besides, to speed up the production, a diffractive optical element (DOE) is tested. This DOE can split the laser beam into 3x3 beam array to fabricate 3x3 array structures at one time. Finally, a scanning method for fabricating 2.5D structure over large area is implemented. By driving the translation stage to scan back and forth and doing tilt-correction through piezo stage, the 2.5D structures such as optical grating, grid, and blazed grating are successfully fabricated.

並列關鍵字

two-photon polymerization ； two-photon absorption ； micro manufacturing ； autofocus ； array fabrication ； diffractive optical element

參考文獻

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[2] M. Emons, K. Obata, T. Binhammer, A. Ovsianikov, B. N. Chichkov, and U. Morgner, “Two-photon polymerization technique with sub-50 nm resolution by sub-10 fs laser pulses,” Opt. Mater. Express, vol. 2, no. 7, p. 942, Jul. 2012.

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國際替代計量

自動化大範圍之雙光子聚合微製造系統

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