掃描探針顯微鏡之減震控制系統

Active Vibration Isolation Technologies for Scanning Probe Microscope

藍國榮(Kuo-Jung Lan)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/博士(2004年)

https://doi.org/10.6342/NTU.2004.10166

摘要

此篇論文旨在研究掃瞄探針顯微鏡主動振動抑制。主動抑制主要是在超高的精度儀器上防止不可避免的地面振動，尤其是對於座落在美國國家標準與技術機構的分子量測儀器，如此高解析度的儀器防振議題更是重要，分子量測實驗室建立一個Mallock系統來限制平台的運動，此防振系統是一個六個輸入六個輸出的複雜三維空間系統，此篇論文建立了一個完整的Mallock系統模型，且設計退耦矩陣以減少各個軸的影響，此外此篇論文比較了傳統的PID控制器與修正線性二次高斯法控制器，順滑模態控制器與離散順滑模態控制器亦應用在此系統中來克服系統非線性。論文最後亦秀出各個控制器的結果，在控制的頻寬中成左漁灠

關鍵字

掃瞄探針顯微鏡 ； 掃瞄穿隧顯微鏡 ； 順滑模態控制 ； 主動振動抑制 ； 線性二次高斯法 ； 離散順滑模態控制

並列摘要

This research investigates the Active Vibration Isolation (AVI) issues related with the Scanning Probe Microscope (SPM). AVI is gaining increased attention in the ultra high precision applications to effectively treat the unavoidable ground vibration. Particularly, it is critical for the optimum operation of the Molecular Measuring Machine (M3), a high-resolution, length-metrology instrument at the National Institute of Standards and Technology (NIST). NIST is investigating active vibration isolation as an approach to improving the M3 image resolution and measurement speed. The M3 system uses a Mallock suspension to establish a non-rotational constraint to the stage motion. The vibration isolation system has to work along with the Mallock geometry. The system is also a six-input-six-output system; therefore a design has to be followed to limit the controller structure to within the range where it can be implemented. This thesis describes the extension of the M3 Mallock isolation suspension from passive to six degrees-of-freedom (DOF) active vibration isolation. It also presents the full dynamic model of the AVI system with the Mallock suspension. A decoupling process is therefore proposed to decompose the axis dynamics. In the thesis system modeling is presented and experimental system identification is carried out for model verification. The thesis then compares the vibration isolation performance using a classical proportional-integral-derivative (PID) controller versus using a modified, model-based, Linear-Quadratic-Gaussian (LQG) controller. The thesis also designs a Sliding Model Controller (SMC) and Discrete Sliding Mode Controller (DSMC) to overcome the system nonlinearities. The experimental results show that the DSMC controller is more effective than the other controllers over the operating frequency band. The maximum attenuation of 15 dB is achieved within the active vibration isolation control bandwidth, and images taken with the M3 scanning tunneling microscope (STM) probe show the improved performance.

並列關鍵字

Linear-Quadratic-Gaussian ； Active Vibration Isolation ； Scanning Probe Microscope ； Sliding Model Controller ； Discrete Sliding Mode Controller ； scanning tunneling microscope

參考文獻

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