動態線掃描頻域光學同調斷層掃描儀即時監測塗膜品質之研究

On-Line Quality Detection of Coating Film by Line-Scan Dynamic Spectral Domain Optical Coherence Tomography

徐英綺(Ying-Chi Hsu)

指導教授 ： 王安邦

國立臺灣大學/工學院/應用力學研究所/碩士(2014年)

https://doi.org/10.6342/NTU.2014.10906

摘要

薄膜塗佈之目的在改變材料表面性質、提昇產品價值，而濕式塗佈製程因材料利用率高、產量大且快速等優勢，被廣泛應用於科技產業。薄膜製程之需求有厚度降低、多層、圖案與特殊結構等趨勢，但目前尚無適當可在生產線上動態檢測的設備，因此只能在成品檢測時淘汰瑕疵品，不但造成材料上的浪費，更難以推知缺陷成因，造成除錯困難。因此本論文之目標為開發一產線上動態檢測系統，應用於塗膜製程中即時監控塗膜品質。本研究採用頻域光學同調斷層掃描(Spectral-domain optical coherence tomography, SD-OCT)技術，此技術具備：不需做深度方向掃描即可完成斷層掃描、非接觸式量測、可連續性量測等優勢，為一極具潛力的線上即時檢測方法。本論文進一步提出以線為單位的斷層掃描，取代傳統以點為單位之來回掃描的方式，當塗佈膜產生的同時便可以達成全膜面的即時掃描，大幅提高量測速度與空間解析度，達到即時監控塗膜品質的需求。
而本研究所目前建構之線掃描頻域光學同調斷層掃描儀的操作範圍與規格為：線掃描線長5.3 mm，線上解析度100 μm (此寬度解析度可透過採用更高放大倍率之鏡頭而進一步更提高) ;深度方向可量測範圍±250 μm，樣品深度方向解析度為2.78 μm，量測頻率為30 Hz，(取決於電荷耦合元件之影像速率(frame rate))，已成功即時量塗佈薄膜與液膜塗佈於塑膠膜之三維斷層掃描。本論文成功設計自製一平價之線掃描頻域光學同調斷層掃描儀即時量測與監控濕膜塗佈品質，希望能為精密量測與製造產業在未來帶來嶄新的面向。

關鍵字

光譜儀式光學同調斷層掃描 ； 線掃描 ； 動態量測 ； 濕膜塗佈 ； 線上檢測

並列摘要

The purposes of coating process are modifying the surface properties and adding the product value. Since wet coating process has the advantages of low cost, fast production and high material utilization rate, it has been widely used in the industry. Moreover, the trend of coating process includes thinner, multilayer, patterned or specially structured coating; however, the product defects are generally detected after the whole fabrication process due to the lack of on-line measuring system that leads to the increase of material waste and cost. Therefore, the goal of this research is to develop an on-line detecting system, which can be applied for the real-time measurement of precision coating film. The spectral-domain optical coherence tomography (SD-OCT) technique was used since SD-OCT has the advantages of non-contact, obtaining depth information without scanning and continuous measurement, and has great potential for on-line detecting method. We further proposed a prototype of line-scanning method, instead of the traditional point-scanning method, in order that the on-line fast measurement of the whole coating film could be achieved for the real applications.
The specifications of this line-scan SD-OCT are: 5.3 mm width of scanning line with resolution of 100 μm (that could be further enhanced by adopting lens with higher magnification), the depth direction measurement range of ± 250 μm with resolution of 2.78 μm, and the measuring frequency of 30 Hz, (that is limited by the frame rate of charge couple device (CCD)). Real coating films on the plastic subtract and three-dimensional structures were measured to prove its use. It is expected to bring a new impact on the on-line precision measurement for industries in the future.

並列關鍵字

spectral-domain optical coherence tomography ； line scanning ； dynamic measurement ； thin film coating ； on-line detection

參考文獻

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