A polymeric DNA sensor using radio frequency detection was developed in this thesis. This biosensor presents an electrical DNA detection method for a coplanar wave guide structures fabricated on a multi-layer polymer. Gold nanoparticles and magnetic nanoparticles are employed to immobilize on the surface of the biosensor to enhance overall detection sensitivity. The surface of the proposed biochip used thioglycolic acid (TGA) chemical reagent to form thiolated modified sensing surface for DNA hybridization. Since the electromagnetic characteristic of the biosensors can be altered through the establishment of multilayer nanoparticles, the performance of the proposed biosensor can be evaluated by the shift of the center frequency of the RF biosensor. The shift of the center frequency is increasing with the raise of the target DNA concentrations. Among the experimental results, the detection limit of the developed biosensor for the DNA detection is 10pM. Moreover, the measured center frequency of the biosensor without nanoparticles is about 6.4 GHz, which is close to the simulated results. The shifts of center frequency using AuNPs and MNPs triple-layer are about 0.9 and 0.7 GHZ, which exceed the shift of the double-layer AuNPs and MNPs by 0.6 and 0.5 GHz, respectively. The polymer biosensor for DNA detection using nano-electromechanical system (NEMS), Radio Frequency (RF), surface modification, and biochemical detection technology is successfully completed. The polymer materials are utilized as substrates to replace conventional substrate such as glass and silicon wafers. Therefore, the price of each biochip is effectively educed by using fully polymeric materials. In this study, the developed biosensor can attain inexpensive, disposable, and high-sensitive advantages for biomedicine diagnostic system. As biotechnology becomes more and more indispensable nowadays, the developed biosensor has potential applications for precise recognizing, fast sensing, and reliable quantifying in disease diagnosis and health care.