- 學位論文
極平整超薄金屬與金屬氧化物結構應用於透明導電膜之研究
Study on the angstrom-scale ultra-smooth metal and metal oxide structure application of TCO at room temperature
摘要
近年來，熱鏡節能窗與透明導電薄膜（TCO），因環保節能之議題而正被廣泛研究，其產業價值和潛力亦隨之水漲船高，伴隨著半導體技術的進步與奈米科技的蓬勃發展，如何將此2種熱門商品合而為一，是現今產業界最為需求之技術。本研究將以蒸鍍機與濺鍍機為鍍膜設備，利用田口法進行參數調配，可以更有效率的得到最佳參數。本研究以熱鏡結構為藍圖，係採用高折射率材料與氣水阻障材料搭配金屬層之三明治結構，利用金屬薄膜於厚度10 nm左右時，對可見光區與熱幅射區具有相當高的反射率與導電性，並透過Maxwell方程式為基礎的電磁場模擬軟體設計，來製作一具熱鏡節能特性之透明導電薄膜。本研究所開發之節能薄膜，將可以同時具備透明導電膜與熱鏡薄膜之優點，本論文所開發之薄膜導電性片電阻將小於7 Ω/sq，可見光穿透率平均值高於80%，熱輻射光區穿透率小於20%（2000 nm），並可透過薄膜材料與薄膜厚度之選擇，開發出可任意調控導電性與光選擇性之新節能導電薄膜，本研究開發反射式高效率節能透明導電薄膜製程，可大量增加熱能的反射以達到高效率節能之特性，並可利用離子源輔助系統達的低溫製程的開發，除可提高生產效率與有效降低材料成本外，亦可藉由機台之設計來達到捲曲式量產之可行性。
並列摘要
Smart window began to emerge in Taiwan 10 years ago. Because of the lack of industrial support and cheap technology, the hot global issue gradually cooled down. However, following the trend of the energy issues and nanotechnology improved, the attention to this field began to grow now. A dielectric–metal–dielectric (DMD) layer structure is a low-energy film structure. It can effectively decrease the transmitted light in the near-infrared (NIR) region, usually by reflection and without affecting visible-light transmission properties. In our research, we propose the new conception which combines low-emissivity (Low-E) with and improve smart window. More particularly, the invention relates to a TCO coating that is manufactured according to electromagnetic field simulation software basing on the Maxwell Equations and that is manufactured by a steam plating system or a sputter plating system under the room temperature or lower temperatures to enable the TCO coating to have wider applications.